Advanced CD Measurement SEM CG6300
The newly developed Advanced CD Measurement SEM CG6300 (HITACHI CD-SEM) will offer higher resolution with a fully renewed electron optical system along with improved metrology repeatability and image quality.
Advanced CD Measurement SEM CS4800
A sustainable CD measurement solution to a wide range of 4, 6, and 8 inch wafer Fabs
Advanced High Voltage CD-SEM “CV6300 Series”
CV6300 Series is the advanced in-line measurement system that realized a 45kV acceleration voltage
Advanced Area Inspection SEM GS1000
For the advanced device production – Large FOV area inspection SEM