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Hitachi High-Tech in Singapore
  1. Hitachi High-Tech in Singapore
  2. Products & Services
  3. Semiconductor Manufacturing Equipment
  4. CD-SEM & Defect Inspection
  5. DR-SEM
  6. Defect Review SEM CR7300 Series

Defect Review SEM CR7300 Series

Defect Review SEM CR7300 Series

Inline Review SEM which contributes yield enhancement with high speed ADR and accurate ADC


  • Enhanced SEM image resolution for cutting-edge device development and mass production
  • New in-situ solution of yield control which is quantified and indicating an Electrical Properties (R / C) in semiconductor process
  • Enhanced productivity which improved throughput performance by 2x compared to the previous model
  • Contribute to the N3-Generation device development by advanced defect review and analysis function for unpatterned wafers
  • Improved defect classification performance and accuracy remarkably by adopting AI based ADC(Automatic Defect Classification)

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