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Hitachi High-Tech in America

Hitachi Launches the SU5000:All New Schottky Field Emission Scanning Electron Microscope with a Novel User Interface Providing High-Quality Images for All Users

Tokyo Japan, July 31, 2014 – On August 4, Hitachi High-Technologies Corporation (TOKYO: 8036, Hitachi High-Tech) will launch the all new SU5000, a Schottky field emission scanning electron microscope (SEM) incorporating a novel user interface, the "EM Wizard." The core feature of the SU5000 with EM Wizard is providing high performance imaging with unmatched ease-of-operation independent of the SEM user's proficiency.

Scanning electron microscopes are powerful imaging and analytical instruments used in a broad range of applications and fields including nanotechnology, materials science, biological research, and industrial manufacturing. Recently, as the utility of the SEM has proliferated, the demand for robust systems yielding quality results independent of the user's capability has increased. Furthermore, the sample needs with regards to size and type continue to expand. The all new SU5000 is Hitachi's solution to the increasing requirements of the modern day SEM.

The SU5000 incorporates the revolutionary EM Wizard utilizing the concept of "experience design," focused around the operator's needs, to significantly enhance and simplify operation of the SEM. The user has the option to select the key operating interest, such as surface information or elemental distribution of the materials, and the microscope automatically adjusts the necessary parameters. Or, advanced mode of operation for unaltered control is available with an easy point-and-click. EM Wizard offers the best of both worlds from completely automated with educational tools to full-access expert mode.

Beyond the EM Wizard, SU5000 boasts some new features and capabilities. The "multi-finder" tool ensures the image remains centered and in focus as the sample is tilted or rotated. The microscope provides specimen probe current, up to 200nA, offering a wide range of observations and analytical utility. A suite of new detectors for improved sensitivity, selectivity, and dynamic range including the proprietary Ultra Variable pressure Detector (UVD) for low vacuum "SE" mode and the new reflective electron detector. The SU5000 is well-equipped to meet the growing demands of SEM sample requirements, observation capabilities, and operational robustness.

Hitachi High-Tech will exhibit the SU5000 at the Microscopy & Microanalysis exhibition, Connecticut USA (Aug 3-7), at JASIS 2014 in the Makuhari Messe International Convention Complex, Chiba City, Chiba Prefecture (Sept 3-5), and at the 18th International Microscopy Congress in Prague, Czech Republic (Sept 7-12).

Main Features

  • A novel, revolutionary user interface, EM Wizard, provides all users with optimum levels of resolution, repeatability, and throughput.
  • Automatic axis adjustment technology (auto-calibration) restores the microscope to its "best condition" on demand.
  • Robust "draw-out" specimen chamber accommodates large specimens (~200 mmΦ, ~80 mmH).
  • Rapid sample exchange; evacuation to observation in 3 minutes or less.

Main Specifications

Electron gun ZrO/W Schottky emission electron gun
Accelerating voltage 0.5 to 30 kV
Irradiation voltage 0.1 to 2.0 kV
Resolution 2.0 nm@1kV*1, 1.2 nm@30kV, 3.0 nm@15kV Low vacuum mode*2
Magnification Photograph magnification: 10-600,000 times
Monitor display magnification: 18-1,000,000 times
5 axis motor-drive stage X: 0-100 mm, Y: 0-50 mm, Z: 3-65 mm, T: -20/+90 deg., R: 360 deg.
Retarding mode option
Low vacuum mode option


Shigeaki Tachibana, Kenichi Sato
Marketing Dept., Science Systems Sales & Marketing Div.
Science & Medical Systems Business Group
Tel: +81-3-3504-7402

Media Inquiries

Reiko Takeuchi, Aiko Matsumoto
CSR & Corporate Communications Dept., CSR Div.
Tel: +81-3-3504-7760