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Hitachi High-Tech in America

Synergistic Lab Solutions for Failure Analysis

Hitachi’s Synergistic Lab Solutions for Failure Analysis (ISTFA 2019 Booth #413)

The ArBlade 5000 delivers large area, damageless surfaces easily transferrable to the Hitachi Regulus Series UHR CFE-SEM for nanoscale imaging resolution. For more precise fault isolation, electrical probing, and I-V curve diagnostics, the in-situ probing system NP6800 can be utilized. The Ethos NX5000 FIB-SEM can automate a series of areas of interest to prepare TEM lamellae for subsequent atomic scale imaging in a Cs-corrected TEM/STEM.

Hitachi’s Synergistic Failure Analysis Solutions

  • At ISTFA 2019, Hitachi will feature the nano prober, Ethos FIB-SEM, ion milling, and other various tools for characterization. During the Tools of the Trade Tour, our solutions for IC sample preparation and characterization will be demonstrated.
Dates November 11-13, 2019
Location Portland, Oregon, U.S.A.
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