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Hitachi High-Tech in America
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  4. CD-SEM & Defect Inspection
  5. Metrology Data Solution

Metrology Data Solution

Data Station for CD-SEM

Data Station for CD-SEM

The Data Station is a networked central recipe management server.

RecipeDirector / DesignGauge-AnalyzerPlus

RecipeDirector / DesignGauge-AnalyzerPlus

Design Based Metrology System

Terminal PC Software

Terminal PC Software

This software improves the operating efficiency of your CD-SEM.