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Hitachi High-Tech in America

Wafer Surface Inspection System LS Series

Wafer surface inspection system to detect various types of small defects on non-patterned wafer of next generation device.


New optics and high speed stage provides high sensitivity and high throughput inspection

Various tool applications:

  • For device manufacturer: incoming inspection and process tool monitoring use
  • For tool and material manufacturer: process and material evaluation use
  • For wafer supplier: outgoing inspection with wafer edge handling use

High accuracy detection discrimination

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