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Hitachi Group
Products & Services

Hitachi Group
Corporate Information

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Products & Services
Semiconductor Manufacturing Equipment
Etch, CD-SEM and Defect Inspection Systems
CD-SEM & Defect Inspection
Wafer Surface Inspection System
Wafer Surface Inspection System LS Series

Wafer Surface Inspection System LS Series

Wafer Surface Inspection System LS Series

Wafer surface inspection system to detect various types of small defects on non-patterned wafer of next generation device.

Features

New optics and high speed stage provides high sensitivity and high throughput inspection

Various tool applications:

For device manufacturer: incoming inspection and process tool monitoring use
For tool and material manufacturer: process and material evaluation use
For wafer supplier: outgoing inspection with wafer edge handling use

High accuracy detection discrimination

Related Products

Multi Purpose SEM "Inspago" RS6000 Series (Defect Review)

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