Three-dimensional models allow height measurements
A 3-dimensional model can be generated without sample tilting and alignment, using 4-segment backscattered electron detector.
| Item | Description |
|---|---|
| Import function | Automatic select and read function of four-elements image data |
| Measurement performance | Depth accuracy less than ±20% (reference) Measurement performance varies depending on calibration accuracy, the condition of the type of specimen, the observation mode and the observation condition |
| Detectable angle range ±60° (reference) TM4000 ±50° (reference) |
|
| Measurement function | Section profile display extracted between any points on the three-dimensional image |
| Distance of X and Y, length and angle measurements between two points, Surface area and Volume | |
| Distance of X,Y and Z, length and many other measurements between 2 points specified on section profile | |
| Simple profile roughness and surface roughness measurement | |
| Baseline offset (straight, curve), leveling and multiple offset | |
| Cutting surface, Color contour line, Bird's-eye view and pseudo color display | |
| Layout, Template and image composition from multiple images functions | |
| Three-dimensional display function | Rotation, zoom-in and multiple rendering process Animation record function of observation screen |
| Output function | Report, Image: RDF, RTF, PNG, JPG, GIF, TIF, BMP, EMF Three-dimension image/movie: SUR, 3MF, STL, WRL, TXT, X3D/WMV, AVI |
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