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Hitachi High-Tech Science Corporation Maintenance and Service

Service Business Division of Hitachi High-Tech Science Corporation is responsible for maintenance and service of following analyrtical instruments: Thermal Analysis Systems, Atomic Force Microscope, XRF Analyzers, XRF Coating Thickness Gauge, ICP-OES/ICP-MS, Focused Ion Beam Systems and Photomask Repair Systems.
We provide support for advancing technologies and innovations, and hope to contribute to your future developments. We believe that in order to ensure that devices operate to their full potential and in optimal environment, highly skilled device maintenance service is essential. As professionals well versed in the maintenance field, we make our best effort to respond to your every need and to find ways to continue improving our service.

Maintenance support and parts sales for EXSTAR6000 series will be terminated as of November 2019 (February 2020 for DMS6100)

Maintenance support and part sales for NanoNavi IIs, NanoNavi II and L-trace II will be terminated .
Please check this page for detailed information about termination dates and already terminated maintenance support.

Services Overview

One-Year Device Protection Plan

We conduct necessary preventative maintenance to ensure continuous product performance and reliability.

Periodic Inspections

We conduct inspections as a preventative measure. We have prepared recommended plans for each product.

On-Call Repairs

We respond to device troubles and failures on a case-by-case basis. Depending on the circumstances, we will dispatch our technical staff for on-site service or conduct in-shop repairs.

Version Upgrades

To ensure that you can continue to use our devices for many years to come, we provide version upgrades and improve device performance.


Focused Ion Beam System

* Contact us to request for other consumables.