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Contributing to High-Resolution SEMs
The intensity of the electron beam source was the main bottleneck restricting the resolution of electron microscopes. Could FE technology, which has an extremely high intensity, be used to address the issue? That was the breakthrough idea that paved the way for high-resolution scanning electron microscopes.
Contributing to the Development of Ultra-Fine Semiconductor Devices
The semiconductor industry has seen fierce competition in product development. In this context, Hitachi has established metrology technology for ultra-fine dimensions by driving the evolution of the FE-SEM from a visualization to measurement device. Hitachi is a global pioneer in this field.
Contributing to Advancement of Healthcare and Biotechnology Fields
'There it is!'
The AIDS virus was believed to be spherical in shape. Under an electron microscope, however, the AIDS virus is actually globular with many rounded protrusions.
Contributing to Research and Advancement in Science and Technology
There were numerous theoretical discussions.However, none of these discussions could decisively settle the debate about the Aharonov-Bohm effect*.The debate was finally settled by electron beam holography using a FE-TEM.
In 1959, Yakir Aharonov and David Bohm stated that a potential was itself a fundamental physical entity, and would affect a charged particle even in a region in which there was no electronic or magnetic field. An electron microscope image of a toroidal (doughnut-shaped) superconductive magnet which completely confines the magnetic field inside, captures a shift in electron interference pattern (see photo) between the inside and outside of the magnet. This image was the decisive proof showing the effect of electromagnetic potential, and lead to the complete verification of the Aharonov-Bohm effect.