Skip to main content


Analytical Systems, Electron Microscopes & Medical Systems

FE-SEM (Field Emission Scanning Electron Microscopes)

Reliability-Proven Ultra-High-Resolution Field-Emission Scanning Electron Microscopes (FE-SEM)

Ultra-high Resolution
Scanning Electron Microscope SU9000

SU9000 is the top-of-the-line SEM equipped with cold FE electron source and in-lens objective lens with least aberration, and achieves the world's highest SE resolution of 0.4nm. In addition to high resolution STEM with 0.34nm resolution, EELS and diffraction that are usually considered difficult for SEM can also be supported.

See more details

Ultra-high Resolution
Scanning Electron Microscope
Regulus Series

Regulus series combine cold FE electron source and semi in-lens objective lens for ultrahigh resolution imaging of large samples. Depending on sample size and analytical purpose, 4 models with different stage are available.

See more details

Ultra-High-Resolution Schottky Scanning Electron Microscope

The SU7000 is designed to allow simultaneous acquisition of multiple secondary and backscattered electron signals, and enables rapid capture of many types of signals. With the ability to display and store up to 6 signal channels simultaneously, the SU7000 offers unsurpassed imaging performance. In addition, it provides a flexible of specimen chamber and vacuum system to support the broad range of observational conditions. Moreover, the electron gun—with its built-in Schottky emitter—can provide irradiating beam currents of up to 200 nA. The SU7000 is built to accommodate the full diversification of future analytical methods.

See more details

Schottky Field Emission
Scanning Electron Microscope SU5000

SU5000 combines Schottky emission electron source and out-lens objective lens for high resolution imaging and diverse analyses of samples with various sizes and compositions. Its drawer type stage allows applications with special stages such as heating, tensile, and so on. Unique user interface, EM Wizard supports best SEM experience of every user.

See more details

MirrorCLEM System
for Correlative Light and Electron Microscopy

MirrorCLEM, a simple solution for correlative light and electron microscopy (CLEM).

See more details

Related topics

Applications of FE-SEM (Field Emission Scanning Electron Microscope) are available on S.I.navi, Hitachi Membership Site.


“S.I.navi” is Hitachi Membership Site for analytical instruments users.
“S.I.navi” provides helpful information for daily analysis.