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Reliability-Proven Ultra-High-Resolution Field-Emission Scanning Electron Microscopes (FE-SEM)
SU9000 is the top-of-the-line SEM equipped with cold FE electron source and in-lens objective lens with least aberration, and achieves the world's highest SE resolution of 0.4nm. In addition to high resolution STEM with 0.34nm resolution, EELS and diffraction that are usually considered difficult for SEM can also be supported.
Regulus series combine cold FE electron source and semi in-lens objective lens for ultrahigh resolution imaging of large samples. Depending on sample size and analytical purpose, 4 models with different stage are available.
SU5000 combines Schottky emission electron source and out-lens objective lens for high resolution imaging and diverse analyses of samples with various sizes and compositions. Its drawer type stage allows applications with special stages such as heating, tensile, and so on. Unique user interface, EM Wizard supports best SEM experience of every user.
SU-70 combines Schottky emission electron source and semi in-lens objective lens for both ultrahigh resolution imaging and diverse analyses. Its field free mode enables EBSP analysis without the influence of magnetic field.
MirrorCLEM, a simple solution for correlative light and electron microscopy (CLEM).
Applications of FE-SEM (Field Emission Scanning Electron Microscope) are available on S.I.navi, Hitachi Membership Site.
“S.I.navi” is Hitachi Membership Site for analytical instruments users.
“S.I.navi” provides helpful information for daily analysis.