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Performance & Power in a Flexible Platform
Hitachi High-Technologies‘ scanning electron microscopes SU3800/SU3900 deliver both operability and expandability. The operator can automate many operations and efficiently utilize their high performance. The SU3900 is equipped with a large multipurpose specimen chamber to accommodate observation of large samples.
Features a graphical user interface offering easy operation and flexibility by:
The Zigzag function enables automatic acquisition of a continuous field of view. The Multi Zigzag function enables zigzag settings at multiple locations on the sample stage, allowing the acquisition of multiple high-magnification images at user-selectable regions of interest. These images can be montaged to create pixel-dense-micrographs by connecting the acquired images with the Viewer function.
The SU3800/SU3900 feature a high-sensitivity UVD. UVD can acquire images and CL information with secondary electron information by detecting the light generated by collisions of secondary electrons and residual gas molecules accelerated by a bias electrode.
With a 5-segment design, it is possible to observe composition images, 3D images, and topographic images from 4 directions without sample rotation. Due to the design and high sensitivity of the detector, high-resolution imaging with improved S/N retention is possible.
The SU3900 is equipped with a large multipurpose specimen chamber to accommodate observation of large samples.
The newly developed SEM/EDS integration system unifies stage location, condition setting, analysis, reports, and a series of operations from the SEM graphic user interface of the SU3800/SU3900. Controlling everything from the SEM graphic user interface improves throughput and reduces operator tasks.
Hitachi map 3D automatically combines 4 images acquired from different directions using the backscattered electron detector to construct a 3D model. Measurements such as height between two points, volume, and simple surface roughness (area roughness, line roughness, etc.) are possible. Since all backscattered electron data is collected in a single acquisition, it is not necessary to tilt the sample or adjust the field of view.
The SU3800/SU3900 feature IPI, which transfers SEM images to advanced image-processing software (Image-Pro® manufactured by Media Cybernetics Inc.). The operator can transfer data from SEM images to sophisticated image-analysis software with just one click.
|Secondary Electron Resolution||3.0 nm (accelerating voltage 30 kV, WD＝5 mm, high vacuum mode)|
|15.0 nm (accelerating voltage 1 kV, WD＝5 mm, high vacuum mode)|
|Backscattered Electron Resolution||4.0 nm (accelerating voltage 30 kV, WD＝5 mm, low vacuum mode)|
|Magnification||×5 to ×300,000 (magnification of image*1)|
|×7 to ×800,000 (magnification of actual display*2)|
|Accelerating Voltage||0.3 kV to 30 kV|
|Low Vacuum Mode Setting||6 to 650 Pa|
|Image Shift||± 50 µm (WD＝10 mm)|
|Maximum Specimen Size||Φ 200 mm||Φ 300 mm|
|Specimen Stage||X||0 to 100 mm||0 to 150 mm|
|Y||0 to 50 mm||0 to 150 mm|
|Z||5 to 65 mm||5 to 85 mm|
|R||360° in continuous mode|
|T||－20 to +90°|
|Maximum Movable Range||Φ 130 mm (in combination with R)||Φ 200 mm (in combination with R)|
|Maximum Movable Height||80 mm (WD= 10 mm)||130 mm (WD= 10 mm)|
|Motor Drive||5-axis motor drive|
|Electron Optics||Electron-Gun||Pre-centered cartridge type tungsten hairpin filament|
|Objective-Lens Aperture||4-hole movable aperture|
|Detectors||Secondary electron detector, sensitive semiconductor backscattered electron detector|
|WD for EDX analysis||WD＝10 mm (T.O.A＝35°)|
|Image Display||Auto-Axis Alignment. Function||Beam control : auto (AFS→ABA→AFC→ABCC)|
|Optical axis adjustment: auto (current alignment)|
|Beam brightness: auto|
|Auto Image Adjustment Function||Auto brightness and contrast control (ABCC)|
|Auto focus control (AFC)|
|Auto stigma and focus (ASF)|
|Auto filament saturation (AFS)|
|Auto beam alignment (ABA)|
|Auto start (HV-ON→ABCC→AFC)|
|Operation Auxiliary Function||Raster rotation, dynamic focus, image improvement function, Data input (point-to-point measurement, angle measurement, texts),preset magnification, Stage positioning navigation function (SEM MAP), beam marking function|
|Optional function||■Hardware: Track ball, Joystick, Operation panel, Compressor, Ultra sensitive low vacuum detector (UVD), Chamber scope, Camera navigation system ■Software: SEM data manager, External communication interface, 3D-capture, Stage free mode, EDS integration|
|Options(for External Devices)||Energy dispersive X-ray spectrometry (EDS), Length dispersive X-ray spectrometry (WDS),Various external stages (heating stage, cooling stage, tensile stage)|
1. Set magnification with 127 mm x 95 mm (4" x 5" picture size) as display size.
2. Set magnification with 509.8 mm x 286.7 mm (1,920 x 1,080 pixels) as display size.