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Tabletop Microscope TM3030Plus

Tabletop Microscope TM3030Plus

The TM3030Plus has a premium SE detector and a BSE detector which have been incorporated in FE-SEM & VP-SEM and well-accepted by users as a high-sensitivity detector.

The premium SE detector operates effectively under the low-vacuum environment and allows for quick SE image observation without specimen preparation.

    Features

    Plus1:Newly Innovated Secondary Electron Detector


    Specimen: Ink printed(Uncoated)
    SE, 5 kV, Charge-up reduction mode,
    Magnification: ×1.0K

    TM3030Plus has a premium SE detector which has been incorporated in FE-SEM & VP SEM, and well-accepted by users as a high-sensitivity detector. It can be operated effectively under a low-vacuum environment and allows for quick SE image observation without specimen preparation.

    Plus2:Unique Compositional Image

    The TM3030Plus allows for effective image analysis with dual signals in one image; displayed as one combined SE signal providing surface rich information and BSE signal for compositional information.

    BSE Image

    SE Image

    Mixing Image

    Specimen: Ceramics(Uncoated)
    5 kV, Standard mode
    Magnification: ×1.0K

    Plus3:High Throughput EDX and Seamless Operation

    The Energy Dispersive X-ray Spectrometer (EDX) for the Hitachi TM3030 series is equipped with the latest SDD (silicon drift detector), a large detection area (30 mm2), and multiple elemental analyses such as point/area analysis, line scan and mapping.

    Uncoated sample observation brings seamless operation for the two signals through element mapping.

    SE Image

    BSE Image

    Mapping Image

    Specimen: Varistor(Uncoated)
    15 kV, Standard mode,
    Magnification: ×3.0K

    *
    Option

    Specifications

    ItemsDescription
    Magnification ×15 to ×60,000 (Up to ×240,000 with digital zoom)
    Observation condition 5 kV/15 kV/EDX
    Signal select BSE/SE/Mix
    Observation mode BSE:Conductor/Standard/Charge-up Reduction
    SE:Standard/Charge-up Reduction
    Mix:Standard/Charge-up Reduction
    Image mode(BSE) COMPO/Shadow 1/Shadow 2/TOPO
    Sample stage traverse X: 35.0 mm, Y: 35.0 mm
    Maximum sample size 70 mm in diameter
    Maximum sample height 50 mm
    Electron gun Pre-centered cartridge filament
    Auto image adjustment function Auto start, Auto focus, Auto brightness/contrast
    Evacuation system (vacuum pump) Turbomolecular pump: 30 L /s × 1 unit,
    Diaphragm pump: 1 m3/h × 1 unit
    Dimansions and weight 330(W) × 606(D) × 565(H) mm, 65.0kg(manual stage)
    330(W) × 633(D) × 565(H) mm, 68.0kg(motor drive stage)
    Diaphragm pump: 145 × 256 × 217mm, 4.5kg

    Application Data

    Semiconductors

    Magnetic head

    Magnetic head
    Surface (5 kV)
    Image signal : Mixing
    magnification : 40×

    LSI interconnect

    LSI interconnect
    EDX (15 kV)
    Image signal : Secondary electrons
    magnification : 1,000×

    Materials Science

    Copper crystals

    Copper crystals
    Surface (5 kV)
    Image signal : Secondary electrons
    magnification : 2,500×

    Fluorescent material

    Fluorescent  material
    Ordinary (15 kV)
    Image signal : Backscattered electrons
    magnification : 5,000×

    Life Sciences

    Butterfly wing

    Butterfly wing
    Ordinary (15 kV)
    Image signal : Secondary electrons
    magnification : 20,000×

    Stomach medication

    Stomach medication
    Ordinary (15 kV)
    Image signal : Secondary electrons
    magnification : 20,000×

    Maintenance

    Easy electron gun maintenance

    When a filament is blown, changing the filament is rather easy. Remove the filament from the Wehnelt cap and simply attach a new filament assembly. Since the new filament is pre-centered at our factory, no adjustment is necessary. After attaching the filament assembly to the electron gun, it will be necessary to align the beam according to the on-board instructions for beam alignment.

    Pre-centered cartridge filament
    Pre-centered cartridge filament

    Wehnelt electrode
    Wehnelt electrode

    Mechanical axis adjustment GUI
    Mechanical axis adjustment GUI

    Technical magazine
    "SI NEWS"

    This journal addresses a wide range variety of research papers and useful application data using Hitachi science instruments.

    nanoart

    Photo collections of beauty of metals, minerals, organisms etc. reproduced by the electron microscope and finished more beautifully by computer graphic technology.

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