SEM (Scanning Electron Microscopes)

Nanometer-scale morphology observation is critical due to the trend of decreasing feature sizes in semiconductor devices and the development of advanced materials. With respect to this, Hitachi High-Tech has developed the SU9600 Scanning Electron Microscope (SEM) that enables subnanometer observations. The new SU9600 system retains the world's highest resolution* of 0.4 nm at 30 kV. It also boasts high throughput and stability making it a powerful tool for research and characterization of next-generation materials.

The SU8700 brings in a new era of Ultrahigh-Resolution Schottky field emission scanning electron microscopes to the long-standing Hitachi EM line-up. This revolutionary FE-SEM platform incorporates multifaceted imaging, high-probe current, automation, efficient workflows for users of all experience levels, and more.

The SU8600 brings in a new era of Ultrahigh-Resolution cold-field emission scanning electron microscopes to the long-standing Hitachi EM line-up. This revolutionary CFE-SEM platform incorporates multifaceted imaging, automation, increased system stability, efficient workflows for users of all experience levels, and more.

The SU7000 is designed to allow simultaneous acquisition of multiple secondary and backscattered electron signals, and enables rapid capture of many types of signals. With the ability to display and store up to 6 signal channels simultaneously, the SU7000 offers unsurpassed imaging performance. In addition, it provides a flexible of specimen chamber and vacuum system to support the broad range of observational conditions. Moreover, the electron gun—with its built-in Schottky emitter—can provide irradiating beam currents of up to 200 nA. The SU7000 is built to accommodate the full diversification of future analytical methods.

The SU3800/3900SE Series offers high-resolution FE-SEM performance combined with user-friendly, intuitive data acquisition for a wide range of applications. With the capacity to support larger and heavier specimens than most FE-SEMs on the market, the observation of substantial specimens, such as building materials, automotive, or aerospace parts, is made possible.

SU5000 combines Schottky emission electron source and out-lens objective lens for high resolution imaging and diverse analyses of samples with various sizes and compositions. Its drawer type stage allows applications with special stages such as heating, tensile, and so on. Unique user interface, EM Wizard supports best SEM experience of every user.

Hitachi High-Tech's scanning electron microscopes SU3800/SU3900 deliver both operability and expandability. The operator can automate many operations and efficiently utilize their high performance. The SU3900 is equipped with a large multipurpose specimen chamber to accommodate observation of large samples.

The FlexSEM 1000 II VP-SEM combines innovative features with an intuitive interface, to deliver flexibility in a powerful, automated, lab-friendly package. Cutting-edge technology provides unrivaled imaging performance, even in variable-pressure environments, a feature typically available in full-sized SEMs.

The TM4000PlusIII/TM4000III is the newest addition to a lineup of microscopes that have sold over 5,800 units worldwide.
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