Photomask Repair System MR8000
Supports large flat panel dispray masks
Can take large photomasks up to a maximum size of 1400×1600 mm.
Can deposit high adhesion film Can form film
with adhesion strength comparable to Cr film on the mask using a special gas.
Can repair gray tone masks
FIB carbon deposition function allows repair of clear defects in gray-tone masks that use half-tone films.
|Max: 1400×1600 mm
Max thickness: 15 mm
Min thickness: 5 mm
|Clear defect repair method
|FIB carbon deposition
|Opaque defect repair method