Search by Industry - MEMS
MEMS
PRODUCT
Focused Ion Beam Systems (FIB/FIB-SEM)
Introduction of Focused Ion Beam Systems (FIB/FIB-SEM)
PRODUCT
Single wafer type ion beam etching machine
Product information of Single wafer type ion beam etching machine.
PRODUCT
Batch type ion beam etching machine
Product information of Batch type ion beam etching machine.
PRODUCT
Batch Type Wet Station
Our system has batch type cleaning ,resist stripping and etching potions. All processes from chemical cleaning to dryer are fully automated.
PRODUCT
Spin Processor (MSP-1)
This spin processor is suitable for R&D and small production. All processes from chemical process to dryer are in one cup.
PRODUCT
Multi Spin Processor (MSP-2)
Multi spin processor is suitable for mass production and Multi complex process.