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Hitachi High-Tech GLOBAL

Tabletop Microscope TM3030

The TM3030 features improved electron optics, higher magnification, and built-in image processing to further enhance image quality and resolution at lower accelerating voltage.


Easy to Use: Compact and portable, with incredibly simple operation.

Tabletop installation

The space saving and lightweight design of TM3030 means it can be conveniently installed on a table*. No cooling water is needed, so installation is quick and easy and requires only a standard 100-240 V AC power supply.

requires a table capable of supporting 100 kg

Comprehensive auto-functions, with one-click “Start”

Imaging with the TM3030 couldn’t be simpler. Pressing the “Start” button automatically turns on the beam, adjusts focus, brightness and contrast, as well as displays the image at an easy-to-view starting magnification of x100.

No sample Preparation; Versatility is assured - with a wide magnifi cation range and multiple operating conditions.

Image non-conducting specimens with ease.

When a non-conductive sample is observed with a high-vacuum SEM,electrons accumulate on the specimen surface causing a charge-up phenomenon. Charging prevents imaging. In order to resolve the charge, the sample is usually coated with a thin layer of metal prior to observation. This process is not only time consuming, but also interferes with optical imaging of surface details as well as EDX analysis. The TM3030 overcomes this problem with “charge-up reduction mode.” This mode uses low-vacuum functionality to dissipate the charge.

Unparalleled Image Quality; Image quality being sharpened and enhanced.

5 kV mode

The 5kV accelerating voltage allows for observation of surface details, it not only offers traditional topographic imaging but also compositional imaging information. The 5 kV observation condition is further enhanced throughout high magnifications by improving the electron optics.

Enhanced sharpness & contrast capability

These functions will be utilized to enhance image quality at any observation condition modes and will be very effective for higher magnification specimens.


Tabletop Microscope TM3030 Specifications

Magnification 15 to 60,000×(digital zoom: 2×, 4×)
Observation condition 5kV/15kV/EDX
Observation mode Standard mode
Charge-up reduction mode
Image mode COMPO/Shadow 1/Shadow 2/TOPO
Sample stage traverse X: ±17.5 mm, Y: ±17.5 mm
Maximum sample size 70 mm in diameter
Maximum sample height 50 mm
Electron gun Pre-centered cartridge filament
Signal detection system High-sensitive semiconductor
4-segment BSE detector
Auto image adjustment function Auto start, Auto focus, Auto brightness/contrast
Frame memory 640 × 480 pixels, 1,280 × 960 pixels
Image data memory HDD of PC and other removal media
Image format BMP, TIFF, JPEG
Data display Micron marker, micron value, date and time, image number and comments, Image mode, Observation condition, D* (Distance), Observation mode
Evacuation system (vacuum pump) Turbomolecular pump: 30 L /s × 1 unit,
Diaphragm pump: 1 m3/h × 1 unit
Operation help functions Raster rotation, Magnification preset (two steps)
Image shift (±50 µm@D*=4.5 mm)
Safety device Over-current protection function, built-in ELCB
D (Distance) is defined as the distance between lower surface of a high-sensitive semiconductor BSE detector and sample surface.

Required PC specifications

OS Windows® 7 Professional (32/64bit version)
CPU Intel® CoreTM i5-2520M (Equivalent or higher)
Memory size 2 GB minimum
Display monitor 1,280 × 800 pixels or 1,368× 768 pixels
Display size 15-Type display
Interface connector Installing USB2.0 and PC-card slot
(IEEE1394 (6pin) for Oxford EDX is indispensable.)
Memory device With HDD DVD-ROM Drive
Other More than 100MB of free space in HDD is required
Interface connector USB 2.0
An associated PC to be procured locally.
Windows is a registered trademark of Microsoft Corporation in the United States and/or other countries.
Intel is a registered trademark of Intel Corp. or its affiliated companies in the United States and/or other countries.
Specifications of a PC are subject to change.

Dimensions and Weight

ItemsDescription(Width × Depth × Height, Weight)
Main unit 330 × 606 × 565 mm, 63.0 kg (manual stage)
330 × 630 × 565 mm, 66.0 kg (motor drive stage)
Diaphragm pump 145 × 256 × 217 mm, 4.5 kg

Installation condition

Room temperature 15 to 30°C (Δt=±2.5°C/h or less)
Humidity 45%-70%RH
Power source (TM3030) Single-phase AC100 to 240 V
(Minimum: 90 V, Maximum: 250 V)
Grounding 100 ohm or less
Another power source for PC is required.
A table with casters is not suitable to put a main unit of TM3030 on.
Recommended table size: 1,200×800 mm, withstand load: 100 kg or more.
Periodical maintenance is required for this apparatus.
Limited to indoor operation.
TM3030 is not approved as a medical device.
Powercables, earth terminal and table should be prepared by users.
Please put a diaphragm pump under the table.
Please make room for more than 200 mm to the left side of a main unit and put it the closest to the center position of the table.
It is advisable not to install or relocate the instrument by yourselves.
When relocating the system, please contact in advance the sales department that handles your account or a maintenance service company designated by Hitachi.
Dedicated mentors, teachers who received the operation training of the instrument are required at compulsory schools.

Image Gallery


Food and Medicine


Electronic Materials


Easy electron gun maintenance

When a filament is blown, changing the filament is rather easy. Remove the filament from the Wehnelt cap and simply attach a new filament assembly. Since the new filament is pre-centered at our factory, no adjustment is necessary. After attaching the filament assembly to the electron gun, it will be necessary to align the beam according to the on-board instructions for beam alignment.

Pre-centered cartridge filament
Pre-centered cartridge filament

Wehnelt electrode
Wehnelt electrode

Mechanical axis adjustment GUI
Mechanical axis adjustment GUI

Technical magazine

This journal addresses a wide range variety of research papers and useful application data using Hitachi science instruments.


Photo collections of beauty of metals, minerals, organisms etc. reproduced by the electron microscope and finished more beautifully by computer graphic technology.

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