Skip to main content


Hitachi High-Tech GLOBAL

FAPC (Linux) Upgrade


  • Life extention (Replacing discontinued workstation)
  • Improve reliability


  • Throughput and productivity improvement
  • Latest software and function available

FA-PC(Linux) upgrade can contribute to improve the customer's productivity and machine reliability by changing workstation(OS: Unix) to FA-PC(OS : Linux).


Improve reliability

  • FA-PC (OS : Linux)
  • HDD capacity increase
  • HDD mirroring function

Throughput improvement

  • High-speed auto focus, faster sequence, High-speed image transfer.

Improve full auto-measurement capability

  • SEM alignment
  • Auto stigmation
  • New pattern recognition algorithm
  • Easy recipe creation
  • New auto-axis adjustment

Applicable model

  • S-9260A : workstation model : B2600
  • S-9380 : workstation model : B2600
FA-PC upgrade may NOT be applicable depending on tool specification or software version. There are some consideration items by upgrading the PC. For more details, please contact us by inquiry form with model name of CD-SEM(s), Serial No., current software version.
UNIX is a registered trademark of The Open Group in the United States Related Products.
Linux is a registered trademark of Linus Torvalds in the United States and other countries.

Related Products