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3D visualization software Hitachi map 3D

3D visualization software Hitachi map 3D

Three-dimensional models allow Z-height Measurements

A three-dimensional model can be generated without sample tilting, using Hitachi’s 4-segment Backscattered electron detector.

  • Directly edit on the flexible layout display.
  • Suppors various measurements such as height, area and volume as well as ISO-compliant surface roughness. Automated and traceable analysis workflow including report creation.


    Hitachi map 3Dsoftware overview

    Hitachi map 3D can generate three-dimensional images without tilting the sample or worrying about images shift since the Hitachi map 3D captures all four directional images from our segmented quad-BSE detector simultaneously.

    Hitachi map 3D software overview
    Sample:Solar cell

    Flexible profile analysis

    Pick up the surface or cross sectional profile on an arbitrary point, measure the height, and make various measurements between the 2 points.

    Cross sectional profile display on any points
    Measurement location can be selected freely from vertical, horizontal and diagonal on the area.
    Whenever the measurement location is moved, the measurement results respond in real time.

    • Height and angle measurement on the extracted line profile

    Sample:Powder spray

    • X, Y and Z analysis between 2 points on the surface or cross section.
      Distance, Z-height, slope or angle can also be measured between 2 points on the surface.

    Sample:Powder spray

    High-definition 3D image display

    • Various 3D renderings are selectable for your surface. Animations can also be applied to your surface and saved as a video file.


    A wealth of report and measurement functions

    Surface roughness and line profile roughness on any line can be measured after 3D reconstruction.
    Any sample results before and after the processing can be simultaneously displayed side by side on a report layout.

    Sample:Comparison of plated metal

    Various output formats supported

    • Report data can be output into a RTF ( Word- compatible ), PDF format and more.
    • 3D-reconstruction data can be output in txt, STL format ( 3D printer compatible ) and more.

    Sample:Star sand

    Full- featured help function in multiple languages

    • The help function includes the formula of the measurement described.
    • Available in 11 languages.


    Item Description
    Import function Automatic select and read function of four-elements image data
    Measurement performance Depth accuracy less than ±20% (reference) Measurement performance varies depending on calibration accuracy, the condition of the type of specimen, the observation mode and the observation condition
    Detectable angle range ±60° (reference)
    TM4000 ±50° (reference)
    Measurement Function Section profile display extracted between any points on the three-dimensional image
    Distance of X and Y, length and any angle measurements between two points, Surface area and volume
    Distance of X, Y and Z, length and many other measurements between 2 points specified on section profile
    Simple profile roughness and surface roughness measurement
    Baseline offset (straight, curve), leveling and multiple offset
    Cutting surface, Color contour line, Bird’s-eye view and pseudo color display
    Layout, Template and image composition from multiple images function
    Three-dimensional display function Rotation, Zoom-in and multiple rendering process Animation record function of observation screen
    Output function Report/ Image: PDF, RTF/PNG, JPG, GIF, TIF, BMP, EMF
    Three-dimension image/ Movie: SUR, 3MF, STL, WRL, TXT, X3D/WMV、AVI

    Application Data1

    Hitachi map 3D Series have following basic functions for the height analysis.


    • The surface of a sample can be observed from any direction from the 3D view of the surface.

    Sample:Broken outer ring of a ball bearing

    Contour lines display

    • Contour lines display available.

    Sample:High functional film

    Approximative color editor

    • Easily apply approximative coloring to SEM images.

    Sample:Plastic elazer

    Application Data2

    Hitachi map 3D Standard has more effective functions for 3D analysis.

    3D Stitching

    • Large-areas can be stitched from multiple contiguous 3D-reconstruction data.

    Sample:Stitched Solar cell

    Contour analysis

    • Diameter, angle and more can be measured on the extracted area or line profile.

    Sample:High functional film

    3D Reconstruct by stereotypic images

    • 3D images can be reconstructed by BSE or SE images.



    • Any two instrument images can be co-located with Hitachi map 3D.

    Sample:Hexagon Nut and Screw

    3D Gallery

    Hitachi map 3D Adds Depth to Your SEM Data

    Hitachi map 3D allows you to augment your 2D SEM data with Z-height information


    Sample: Fractured surface of semiconductor
    Signal: Backscattered electrons
    Magnification: 1,000x

    Sample: Defect surface on the connector
    Signal: Backscattered electrons
    Magnification: 1,200x


    Sample: Solar cell
    Signal: Backscattered electrons
    Magnification: 2,000x

    Sample: Micro-lens array
    Signal: Backscattered electrons
    Magnification: 2,000x


    Sample: Boiled egg yolk
    Signal: Backscattered electrons
    Magnification: 200x

    Sample: Compound multifaceted eyes of dragonfly
    Signal: Backscattered electrons
    Magnification: 1,000x

    Sample: Hair
    Signal: Backscattered electrons
    Magnification: 1,000x

    Technical magazine
    "SI NEWS"

    This journal addresses a wide range variety of research papers and useful application data using Hitachi science instruments.


    Photo collections of beauty of metals, minerals, organisms etc. reproduced by the electron microscope and finished more beautifully by computer graphic technology.

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