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Analytical Systems, Electron Microscopes & Medical Systems

3D Visualization Software Hitachi map 3D

3D visualization software Hitachi map 3D

Three-dimensional models allow Z-height Measurements

Using Hitachi' s latest high speed, 4-segment Backscattered Electron Detector, a three-dimensional model can be generated without sample tilting or manually collecting consecutive images.

  • Directly edits on the flexible layout display.
  • Supports various measurements such as height, area, and volume as well as ISO-compliant surface roughness.
  • Automated and traceable analysis workflow including report creation.


    Hitachi map 3D Software Overview

    Hitachi map 3D generates three-dimensional images without sample/stage tilting or image shift.
    Hitachi map 3D captures all four directional images simultaneously with a high-speed, segmented Backscattered Electron Detector (BSED).

    Hitachi map 3D software overview
    Sample:Solar cell

    Flexible Profile Analysis

    Automatically collects data from the sample surface or cross-sectional profile for surface roughness and structural height, or makes various measurements between the 2 points.

    • Cross-sectional profile display from any points within the 3D map
    • Measurement location can be selected freely from vertical, horizontal, and diagonal points from the 3D image.
      Whenever the measurement location is changed, the measurement results respond in real time.

    • Height and angle measurements are possible on the user defined line profile.

    Sample:Powder spray

    • X, Y, and Z analysis between 2 points on the surface or cross section.
      Distance, Z-height, slope, or angle can be measured between 2 points on the 3D map image.

    Sample:Powder spray

    High-definition 3D Image Display

    • Numerous 3D rendering modes are user selectable for surface characterization. Animations can be applied to the 3D image and saved as a video file.


    A Wealth of Report and Measurement Functions

    • Surface and line profile roughness measurements can be made on any area of the 3D reconstructed image.
    • Any sample results before and after the processing can be simultaneously displayed side by side on a report layout.

    Sample:Comparison of plated metal

    Various Output Formats Supported

    • Report data can be output to several formats including RTF (Word-compatible), PDF, and more.
    • Three-dimensional reconstruction data can be output in txt, STL format (3D printer compatible), and more.

    Sample:Star sand

    Full-Featured Help Function in Multiple Languages

    • The help function describes the formulas used for each measurement mode.
    • Available in 11 languages.


    Item Description
    Import function Automatic select and read function of four segment BSE image data
    Measurement performance Measurement performance varies depending on calibration accuracy, the condition of the type of specimen, the observation mode, and the observation condition.
    Detectable angle range ±60° (reference)
    TM4000 ±50° (reference)
    Measurement Function Section profile display extracted between any area on the three dimensional image
    Distance of X and Y, length and any angle measurements between two points, surface area, and volume
    Distance of X, Y, and Z, length and many other measurement functions between 2 points specified on section profile
    Simple profile and surface roughness measurements
    Baseline (straight, curve), leveling, and multiple offsets
    Cutting surface, Color contour line, Bird' s-eye view, and pseudo color display
    Layout, templates, and image composition from multiple-image function
    Three-dimensional display function Rotation, zoom-in, and multiple rendering processes. Animation video record function of observation screen
    Output function Report/image: PDF, RTF/PNG, JPG, GIF, TIF, BMP, EMF
    3D image/movie: SUR, 3MF, STL, WRL, TXT/X3D/WMV, AVI

    Application Data1

    Basic Functions for Height Analysis

    3D View

    • The sample can be observed from any direction from the 3D map view of the surface.

    Sample:Defective Area of an Outer Ring of a Ball Bearing

    Contour Lines Display

    • Contour lines display available.

    Sample:High Functional Film

    Color Editor

    • Apply pseudo coloring to SEM images.

    Sample:Rubber Eraser

    Application Data2

    Effective 3D Analysis Functions

    3D Stitching

    • Large areas can be automatically stitched from multiple contiguous 3D-reconstruction regions of interest.

    Sample:Stitched Solar cell

    Contour Analysis

    • Diameter, angle, etc. can be measured on the extracted area or line profile.

    Sample:High Functional Film

    3D Reconstruction by Stereotypic Images

    • Reconstruction of 3D images by using either BSE or SE images.


    Correlative Microscopy

    • Correlate electron and optical images with Hitachi map 3D.

    Sample:Hexagon Nut and Bolts

    3D Gallery

    Hitachi map 3D Adds Depth to Your SEM Data

    Hitachi map 3D allows you to augment your 2D SEM data with Z-height information


    Sample: Fractured surface of semiconductor
    Signal: Backscattered electrons
    Magnification: 1,000x

    Sample: Defect surface on the connector
    Signal: Backscattered electrons
    Magnification: 1,200x


    Sample: Solar cell
    Signal: Backscattered electrons
    Magnification: 2,000x

    Sample: Micro-lens array
    Signal: Backscattered electrons
    Magnification: 2,000x


    Sample: Boiled egg yolk
    Signal: Backscattered electrons
    Magnification: 200x

    Sample: Compound multifaceted eyes of dragonfly
    Signal: Backscattered electrons
    Magnification: 1,000x

    Sample: Hair
    Signal: Backscattered electrons
    Magnification: 1,000x

    Technical magazine
    "SI NEWS"

    This journal addresses a wide range variety of research papers and useful application data using Hitachi science instruments.


    Photo collections of beauty of metals, minerals, organisms etc. reproduced by the electron microscope and finished more beautifully by computer graphic technology.

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