The H-9500 is a 100-300 kV TEM with an LaB6 electron gun. This is a user-friendly workhorse for atomic-resolution TEM imaging and routine structural characterization. The excellent imaging capability also makes the H-9500 a platform for in-situ TEM. Various Hitachi in-situ heating TEM specimen holders* enable the imaging of dynamic structural changes at elevated temperatures. A special version for gas environmental in-situ TEM is available.
Windows®-compatible GUI design.
High specimen throughput, requring 1 minute for specimen exchange and 5 minutes for voltage ramp-up (300 kV) and beam-on.
Point-to-point resolution of 0.18 nm and lattice resolution of 0.1 nm.
A stable 5-axis eucentric goniometer stage.
Field-proven 10-stage accelerator gun design.
High-voltage resistor cable design.
Specimen holders compatible with Hitachi TEM, FIB, and STEM systems.
A variety of specimen holders that provide heating, cooling, and gas-injection capabilities for atomic-resolution dynamic studies.
| Resolution | 0.10 nm (lattice) 0.18 nm (point-to-point) |
|
|---|---|---|
| Accelerating voltage | 300 kV, 200 kV*1, 100 kV*1 | |
| Magnification | Zoom mode | 1,000 - 1,500,000× |
| SA mode | 4,000 - 500,000× | |
| Low mag mode | 200 - 500× | |
| Erectron gun | Filament | LaB6 (DC heating) |
| Filament exchange | Automated gun lift | |
| High voltage cable | Resistor cable | |
| Illumination system | Lens | 4-stage lens system |
| Condenser aperture | Click-stop 4-openings | |
| Probe size | Micro mode: 0.05 - 0.2 µm (4 steps) Nano mode: 1 - 10 nm (4 steps) |
|
| Beam tilt | ±3° | |
| Imaging system | Lens | 5-stage lens system |
| Focusing | Image wobbler Astigmatism correction by stigmonitor Optimum focus |
|
| Objective aperture | Click-stop 4-openings | |
| Selected area aperture | Click-stop 4-openings | |
| Erectron diffraction | Selected-area electron diffraction Nano probe electron dilfraction Convergent-beam electron diffraction |
|
| Camera length | 250 - 3,000 mm | |
| Specimen chamber | Specimen stage | Eucentric 5-axis Hiper goniometer stage |
| Specimen size | 3 mmΦ | |
| Stage translation | X/Y = ±1 mm, Z = ±0.3 mm Motor drive by CPU control |
|
| Specimen position display | Auto-drive, Auto-trace | |
| Specimen tilt | α = ±15°, β = ±15° (Hitachi double tilt specimen holder*2) |
|
| Anti-contamination | Cold block | |
| Baking function | Mild baking function | |
| Viewing chamber | Fluorescent screen | Main screen: 110 mmΦ Focusing screen: 30 mmΦ |
| Optical viewer | 7.5× | |
| Camera chamber | Field selection | Full/half exposure |
| Film | 25 sheets (2 sets of film magazines) | |
| GUI | Monitor | 19 inch monitor |
| Functions | Database, measurement, image processing | |
| Digital CCD camera*3 | Camera coupling | Lens coupling |
| Effective pixels | 1,024 × 1,024 pixels | |
| A/D resolution | 12 bits | |
| Vacuum system | Electron gun | Ion pump: 60 L/s |
| Column | TMP: 260 L/s | |
| Viewing/camera chamber | Diffusion pump: 280 L/s Fore pump: 135 L/min. × 3 sets |
|
The above specifications are guaranteed at an accelerating voltage of 300 kV
Accelerating voltage : 300 kV
Temperature : 380°C
Atmosphere : Air@6 Pa on specimen
Accelerating voltage : 100 kV
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