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Analytical Systems, Electron Microscopes & Medical Systems

Transmission Electron Microscope H-9500

Transmission Electron Microscope H-9500

The H-9500 is a 100-300 kV TEM with an LaB6 electron gun. This is a user-friendly workhorse for atomic-resolution TEM imaging and routine structural characterization. The excellent imaging capability also makes the H-9500 a platform for in-situ TEM. Various Hitachi in-situ heating TEM specimen holders* enable the imaging of dynamic structural changes at elevated temperatures. A special version for gas environmental in-situ TEM is available.

Optional accessory


    User-friendly operation

    Windows®-compatible GUI design.
    High specimen throughput, requring 1 minute for specimen exchange and 5 minutes for voltage ramp-up (300 kV) and beam-on.

    Stable high-resolution microscopy

    Point-to-point resolution of 0.18 nm and lattice resolution of 0.1 nm.
    A stable 5-axis eucentric goniometer stage.

    Excellent performance reliability

    Field-proven 10-stage accelerator gun design.
    High-voltage resistor cable design.

    Various optional accessories

    Specimen holders compatible with Hitachi TEM, FIB, and STEM systems.
    A variety of specimen holders that provide heating, cooling, and gas-injection capabilities for atomic-resolution dynamic studies.

    Images on the FPD (flat panel display) are simulated.


    Resolution 0.10 nm (lattice)
    0.18 nm (point-to-point)
    Accelerating voltage 300 kV, 200 kV*1, 100 kV*1
    MagnificationZoom mode 1,000 - 1,500,000×
    SA mode 4,000 - 500,000×
    Low mag mode 200 - 500×
    Erectron gunFilament LaB6 (DC heating)
    Filament exchange Automated gun lift
    High voltage cable Resistor cable
    Illumination systemLens 4-stage lens system
    Condenser aperture Click-stop 4-openings
    Probe size Micro mode: 0.05 - 0.2 µm (4 steps)
    Nano mode: 1 - 10 nm (4 steps)
    Beam tilt ±3°
    Imaging systemLens 5-stage lens system
    Focusing Image wobbler
    Astigmatism correction by stigmonitor
    Optimum focus
    Objective aperture Click-stop 4-openings
    Selected area aperture Click-stop 4-openings
    Erectron diffraction  Selected-area electron diffraction
    Nano probe electron dilfraction
    Convergent-beam electron diffraction
    Camera length 250 - 3,000 mm
    Specimen chamberSpecimen stage Eucentric 5-axis Hiper goniometer stage
    Specimen size 3 mmΦ
    Stage translation X/Y = ±1 mm, Z = ±0.3 mm
    Motor drive by CPU control
    Specimen position display Auto-drive, Auto-trace
    Specimen tilt α = ±15°, β = ±15°
    (Hitachi double tilt specimen holder*2)
    Anti-contamination Cold block
    Baking function Mild baking function
    Viewing chamberFluorescent screen Main screen: 110 mmΦ
    Focusing screen: 30 mmΦ
    Optical viewer 7.5×
    Camera chamberField selection Full/half exposure
    Film 25 sheets (2 sets of film magazines)
    GUI Monitor 19 inch monitor
    Functions Database, measurement, image processing
    Digital CCD camera*3Camera coupling Lens coupling
    Effective pixels 1,024 × 1,024 pixels
    A/D resolution 12 bits
    Vacuum systemElectron gun Ion pump: 60 L/s
    Column TMP: 260 L/s
    Viewing/camera chamber Diffusion pump: 280 L/s
    Fore pump: 135 L/min. × 3 sets
    Magnification is calibrated as an option
    An optional item
    This specification applies to an optional 1,024 × 1,024 pixel digital CCD-camera.

    The above specifications are guaranteed at an accelerating voltage of 300 kV

    Application Data

    Materials Science

    Si3N4 high resolution TEM image

    Si3N4 high resolution TEM image
    Accelerating voltage : 300 kV

    TiO2 gas-injecting in situ TEM observation

    TiO2 gas-injecting in situ TEM observation
    Temperature : 380°C
    Atmosphere : Air@6 Pa on specimen

    Pt/Graphite carbon high resolution TEM image

    Pt/Graphite carbon high resolution TEM image
    Accelerating voltage : 100 kV


    Si device high resolution TEM images

    Si device high resolution TEM images


    Hitachi TEM Application Data

    Technical magazine
    "SI NEWS"

    This journal addresses a wide range variety of research papers and useful application data using Hitachi science instruments.


    Photo collections of beauty of metals, minerals, organisms etc. reproduced by the electron microscope and finished more beautifully by computer graphic technology.

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