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Spherical Aberration Corrected STEM/SEM HD-2700

Spherical Aberration Corrected STEM/SEM HD-2700

The HD-2700 is an 80-200 kV field-emission-gun scanning transmission electron microscope (STEM) with secondary electron (SE) imaging capability. Bulk and surface structures of a specimen can be imaged simultaneously. With the option for a probe-forming aberration corrector, ultra-high resolution can be achieved for both STEM and SE imaging. The Hitachi corrector minimizes the user's effort in doing aberration correction. Large solid-angle EDS* and atomic-spatial-resolution EDS* and EELS spectrum imaging* are enabled.

    Features

    High-resolution STEM imaging

    HAADF-STEM image 0.136 nm, FFT image 0.105 nm (HR lens*)
    BF STEM image 0.204 nm (w/o Cs-corrector)

    High-speed & high-sensitivity EDX analysis: Probe current × 10 times

    Timely and rapid elemental mapping
    Low-concentration element detection

    Hitachi-developed Cs-corrector

    Equipped with a probe-forming spherical aberration corrector developed by Hitachi, the automatic aberration-correction process takes a short time and does not require prior experience for aberration correction.

    Seamless solution from sample preparation to observation & analysis

    Holder compatible with Hitachi FIB

    *:
    Optional accessory

    Specifications

    ItemsDescription
    w/o Cs-correctorw/ Cs-corrector
    Image resolution 0.204 nm guaranteed (at a magnification of
    ×4,000,000)
    0.136 nm guaranteed (HAADF-STEM image)
    0.105 nm guaranteed (FFT)(at a magnification of
    ×7,000,000)(HR lens)
    Magnification ×100 - ×10,000,000
    Accelerating voltage 200 kV, 120 kV *, 80 kV*
    Imaging signal Bright field STEM: Phase contrast image (TE image)
    Dark field STEM: Z-contrast image (ZC image)
    Secondary electron image (SE image)
    Electron diffraction*
    Characteristic X-ray analysis and mapping(EDX)*
    EELS analysis and mapping(EV3000)*
    Electron optics       Electron source Schottky emitter (w/o Cs-corrector)
    Cold field emitter (w/Cs-Correcter,w/o Cs-corrector)
    Illumination lens system 2-stage condenser lens
    Cs-corrector* Mullipole transfer lens design
    Scanning coil 2-stage electromagnetic coil
    ZC collection angle control Projector lens design
    Electromagnetic image shift ±1 µm
    Specimen stage  Specimen movement X/Y = ±1 mm, Z= ±0.4 mm
    Specimen tilt Single-tilt holder: ±30° (Std. lens), ±18° (HR lens)
    *
    Option

    Cs-corrected SEM imaging

    The Hitachi HD-series dedicated STEM is equipped with a secondary electron (SE) detector as standard configuration; this enables imaging the specimen surface directly in addition to obtaining interior structural information of specimen via the transmitted electron beam. SE imaging offers fine dimension measurements of thicker samples not compatible with STEM.
    Spherical aberration correction pushes the SEM resolution to an unprecedented, true atomic level.


    LSI device cross-sectional SEM image
    (Vacc.:200 kV, Specimen thickness: 1 µm)


    The principle of SE detection

    Large solid-angle EDS detector

    A large solid-angle SDD (100 mm2) provides greatly enhanced EDS analytical sensitivity compared with previous models, as well as higher throughput of elemental analysis in a shorter data-acquisition time.

    Semiconductor MOS transister EDS mapping Instrument: HD-2700B(non Cs-corrected), Acquisition time:10sec./frame, Playback speed:5×

    Application Data

    Semiconductors

    Cross Section BF-STEM Images of 32 nm NMOS Transistor

    HD-2700 with aberration corrector
    Acceleration Voltage : 200 kV

    Dopant profile of 32 nm NMOS transistor

    Instruments: HD-2700,
    Accelerating Voltage: 200 kV,
    Pixel Size : 128 x 100 pixels,
    Acquisition time : 30 min.

    Cross section SEM images

    Materials Science

    BF-STEM (a) and SD-STEM (b) image of austenitic stainless steel.

    SD-STEM: Selected Diffraction STEM

    SD-STEM image of austenitic stainless steel.

    Atomic resolved EDX map SrTiO3

    Atomic resolved EDX map GaAs

    Topics

    Article information on Hitachi technical magazine "SI NEWS"

    Article information on Hitachi technical magazine "SI NEWS"
    This journal addresses a wide range variety of research papers and useful application data using Hitachi science instruments. Those authors are notable researchers and Hitachi application engineers. This is an Spherical Aberration Corrected STEM/SEM HD-2700

    Launch of HD-2700 Scanning Transmission Electron Microscope Equipped with Hitachi Spherical Aberration Corrector (May 10, 2012 : News Release)

    Hitachi High-Technologies Corporation (TOKYO: 8036, Hitachi High-Tech) announced today the launch of HD-2700, a scanning transmission electron microscope (STEM) equipped with a spherical aberration corrector developed by Hitachi High-Tech. The associated automatic aberration correction function facilitates the use of the corrector and significantly reduces the time needed for aberration correction.

     

    Applications

    Hitachi TEM Application Data

    Technical magazine
    "SI NEWS"

    This journal addresses a wide range variety of research papers and useful application data using Hitachi science instruments.

    nanoart

    Photo collections of beauty of metals, minerals, organisms etc. reproduced by the electron microscope and finished more beautifully by computer graphic technology.

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