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In order to identify the resin shape of the LED surface, the three dimensional image can be obtained with the 3D-View(option). The 3D-View can be identified the shape of roughness and scratches.
A three-dimensional model can be automatically constructed by calculating surface shapes in 4 directions based on signals obtained from a tetrameric backscattered electron detector, without adjusting the sample slope or location of the visual field.
The device also enables measurement of the height dimension between 2 points as well as simple surface roughness measurement based on the surface area and cross-section profile.