Metrology Solution

Advanced CD Measurement SEM CG6300

The newly developed Advanced CD Measurement SEM CG6300 (HITACHI CD-SEM) will offer higher resolution with a fully renewed electron optical system along with improved metrology repeatability and image quality.

Advanced CD Measurement SEM CG7300

For the EUV era device production – High Reliability CD-SEM

Advanced CD Measurement SEM CS4800

A sustainable CD measurement solution to a wide range of 4, 6, and 8 inch wafer Fabs

Advanced High Voltage CD-SEM “CV6300 Series”

CV6300 Series is the advanced in-line measurement system that realized a 45kV acceleration voltage

Advanced Area Inspection SEM GS1000

For the advanced device production – Large FOV area inspection SEM