| Schaumburg, IL | Divisions: Administration, Analytical Systems, Industrial Solutions, Metrology and Analysis Systems |
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| Dallas, TX | Divisions: Administration, Analytical Systems, Metrology and Analysis Systems, Semiconductor Etch Equipment |
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| Greenville, SC | Divisions: Systems Products |
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| Pleasanton, CA | Divisions: Administration, Legal, Analytical Systems, Metrology and Analysis Systems, Semiconductor Etch Equipment |
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| Santa Clara, CA | Divisions: Analytical Systems, Industrial Solutions |
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| Hillsboro, OR | Divisions: Administration, Metrology and Analysis Systems, Semiconductor Etch Equipment |
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| Nanotechnology Innovation Center Portland (Hillsboro, OR) | Divisions: Administration, Metrology and Analysis Systems, Semiconductor Etch Equipment |
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| Portland Engineering Center (Hillsboro, OR) | Divisions: Administration, Metrology and Analysis Systems, Semiconductor Etch Equipment |
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| Hitachi High Tech Science Park (Chatsworth, CA) | Divisions: Analytical Systems, Metrology and Analysis Systems |
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| Boise, ID | Divisions: Semiconductor Equipment Division |
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| Chandler, AZ | Divisions: Semiconductor Equipment Division |
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| Scottsdale, AZ | Divisions: Semiconductor Etch Equipment |
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| Westford, MA | Divisions: Analytical Systems |
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| Clarksburg, MD | Divisions: Metrology and Analysis Systems |
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| Mexico City | Divisions: Industrial Solutions, Metrology and Analysis Systems |
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