| Dallas, TX | 1375 North 28th Avenue, P.O. Box 612208 Dallas, TX 75261-2208 Tel: (972) 615-9000 Divisions: Administration, Electron, Ion, and Probe Microscopy, Life Sciences, Semiconductor Etch Equipment, Semiconductor Metrology Equipment |
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| Greenville, SC | 208 Fairforest Way Greenville, SC 29607 Tel: (864) 299-2600 Fax: (864) 299-2700 Divisions: Systems Products |
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| Pleasanton, CA | 5960 Inglewood Drive, Suite 200 Pleasanton, CA 94588-3355 Tel: (925) 218-2800 Divisions: Administration, Legal, Electron, Ion, and Probe Microscopy, Life Sciences, Semiconductor Etch Equipment |
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| Santa Clara, CA | 5201 Great America Parkway, Suite 236 Santa Clara, CA 95054-1130 Tel: (408) 982-4630 Divisions: Industrial Solutions, Life Sciences |
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| Hillsboro 1 (Hillsboro, OR) | 2900 NE Century Boulevard Suite 200 Hillsboro, OR 97124-7114 Tel: (503) 616-9280 Divisions: Electron, Ion, and Probe Microscopy, Semiconductor Metrology Equipment |
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| Hillsboro 2 (Hillsboro, OR) | 2500 NE Century Boulevard Suites 100 & 400 Hillsboro, OR, 97124 Tel: (503) 616-9280 Divisions: Administration, Semiconductor Etch Equipment, Semiconductor Metrology Equipment |
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| Portland Engineering Center (Hillsboro, OR) | 6357 NE Evergreen Parkway Building D Hillsboro, OR 97124-7285 Tel: (503) 616-7111 Divisions: Administration, Electron, Ion, and Probe Microscopy, Semiconductor Etch Equipment |
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| Hitachi High Tech Science Park (Chatsworth, CA) | 20770 W. Nordhoff Street, Building 4, Chatsworth, California 91311 |
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| Mexico City | Av. Paseo de la Reforma No. 483 (Torre Reforma), Piso 13, Col. Cuauhtémoc, C.P. 06500 Ciudad de Mexico Divisions: Industrial Solutions |
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