| Schaumburg, IL | Divisions: Administration, Industrial Solutions, Electron, Ion, and Probe Microscopy, Electronic Products, Life Sciences |
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| Dallas, TX | Divisions: Administration, Electron, Ion, and Probe Microscopy, Life Sciences, Semiconductor Etch Equipment, Semiconductor Metrology Equipment |
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| Greenville, SC | Divisions: Systems Products |
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| Pleasanton, CA | Divisions: Administration, Legal, Electron, Ion, and Probe Microscopy, Life Sciences, Semiconductor Etch Equipment |
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| Santa Clara, CA | Divisions: Industrial Solutions, Life Sciences |
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| Hillsboro 1 (Hillsboro, OR) | Divisions: Electron, Ion, and Probe Microscopy, Semiconductor Metrology Equipment |
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| Hillsboro 2 (Hillsboro, OR) | Divisions: Administration, Semiconductor Etch Equipment, Semiconductor Metrology Equipment |
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| Portland Engineering Center (Hillsboro, OR) | Divisions: Administration, Electron, Ion, and Probe Microscopy, Semiconductor Etch Equipment |
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| Hitachi High Tech Science Park (Chatsworth, CA) |
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| Boise Office (Boise, ID) | Divisions: Semiconductor Equipment Division |
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| Chandler Office (Chandler, AZ) | Divisions: Semiconductor Equipment Division |
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| Clarksburg, MD | Divisions: Electron, Ion, and Probe Microscopy |
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| Mexico City | Divisions: Industrial Solutions |
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