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Batch Type Wet Station
Our system has batch type cleaning ,resist stripping and etching potions. All processes from chemical cleaning to dryer are fully automated.
Spin Processor (MSP-1)
This spin processor is suitable for R&D and small production. All processes from chemical process to dryer are in one cup.
Multi Spin Processor (MSP-2)
Multi spin processor is suitable for mass production and Multi complex process.
LED Thermal Resistance Measuring Equipment
LED thermal resistance measurement by ⊿VF method Can measure LED modules and LED elements by the use of large current ""Rapid response"" ""stability"", ""large current"" of power ⇒ Achieves steady and transition thermal resistance measurement Has a temperature coefficient measurement function (Can make connection with thermostatic bath) With multi-element switching function (maximum 100 ch)
Focused Ion Beam Systems (FIB/FIB-SEM)
Introduction of Focused Ion Beam Systems (FIB/FIB-SEM)
The unique technology, developed by Hitachi High-Tech Solutions, will search unknown compounds and create new value unbounded by existing products.
Electronic Printer CyberPrinter
The CyberPrinter, which can be connected to the EX6000/7000, and has the connected message function, is a multi-functional process electronic printer that has a track record management function to collect and accumulate and analyze process and alarm data.
Integrated Instrumentation System EX-N01A
Since its launch in 1975, Hitachi integrated instrumentation system EX series has been used as a supervisory control system in various fields like chemical processing, food, pharmaceuticals, energy, water treatment and environment. This time, to provide the best operation beyond the reliability Hitachi has established so far, we have fundamentally reviewed its functions.
Compact Instrumentation System PD-N01
Hitachi compact instrumentation system, “PD-N01” is a newly conceived instrumentation system that enables advanced and complex analog control of temperature, flow rate and pressure by implementing an operation module of the distributed control system (DCS) for the programmable controller (PLC). New concept instrumentation that utilizes the inheritance of the advantage of DCS such as powerful analog control function, rich monitoring and control software group and software assets and is compactified for the easy availability of hardware.
Rail and Conductor Inspection Systems
A Full Lineup of Inspection Equipment That Supports Japan's World-Class Railroad Network. Our test equipment is used in the test cars of Japan's major railroad companies, including the test car for the Shinkansen bullet train. From car-mounted systems, to towed and manually-operated devices, our rail and contact wire inspection systems operate around the clock under regular operating speeds to ensure safety, reliability and a smooth ride.
LE4000A Exposure System for Large Size Glass Substrate
A high speed proximity exposure system for volume production of color filter substrate. System achieves high throughput and high reliability.
Disk Surface Inspection System NS1500 Series
The sophisticated classify defect can be detected by the develop and evaluation disk surface inspection system that measure at a same spindle by optical interference, laser irradiation of multi bearing and newly developed incline defect method.