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Semiconductor






PRODUCT
Electronic Printer CyberPrinter
The CyberPrinter, which can be connected to the EX6000/7000, and has the connected message function, is a multi-functional process electronic printer that has a track record management function to collect and accumulate and analyze process and alarm data.


PRODUCT
Integrated Instrumentation System EX-N01A
Since its launch in 1975, Hitachi integrated instrumentation system EX series has been used as a supervisory control system in various fields like chemical processing, food, pharmaceuticals, energy, water treatment and environment. This time, to provide the best operation beyond the reliability Hitachi has established so far, we have fundamentally reviewed its functions.

PRODUCT
Compact Instrumentation System PD-N01
Hitachi compact instrumentation system, “PD-N01” is a newly conceived instrumentation system that enables advanced and complex analog control of temperature, flow rate and pressure by implementing an operation module of the distributed control system (DCS) for the programmable controller (PLC). New concept instrumentation that utilizes the inheritance of the advantage of DCS such as powerful analog control function, rich monitoring and control software group and software assets and is compactified for the easy availability of hardware.

PRODUCT
Focused Ion Beam Systems (FIB/FIB-SEM)
Introduction of Focused Ion Beam Systems (FIB/FIB-SEM)


PRODUCT
Single wafer type ion beam etching machine
Product information of Single wafer type ion beam etching machine.

PRODUCT
Batch type ion beam etching machine
Product information of Batch type ion beam etching machine.

PRODUCT
Batch Type Wet Station
Our system has batch type cleaning ,resist stripping and etching potions. All processes from chemical cleaning to dryer are fully automated.

PRODUCT
Spin Processor (MSP-1)
This spin processor is suitable for R&D and small production. All processes from chemical process to dryer are in one cup.

PRODUCT
Multi Spin Processor (MSP-2)
Multi spin processor is suitable for mass production and Multi complex process.


PRODUCT
LED Thermal Resistance Measuring Equipment
Introduction of LED Thermal Resistance Measuring Equipment

PRODUCT
Fluorescent X-ray (XRF) Coating Thickness Gauge FT110A
The FT110A XRF Coating Thickness Gauge has a new auto focus function which automatically focuses on the sample to acquire optical image within a few seconds. No manual adjustment is required, which results in higher throughput.

PRODUCT
X-ray (XRF) Coating Thickness Gauge FT160 Series
Equipped with polycapillary X-ray focusing optics and a silicon drift detector, FT160 enables high preciseness and high throughput in nano-order level coating thickness measurement of electronic parts.




PRODUCT
Life Cycle Management Solution for Lithium-ion Batteries
Introduction of Life Cycle Management Solution for Lithium-ion Batteries.