Hitachi's unique 200 kV aberration-corrected TEM/STEM: the perfect harmony of imaging resolution and analytical performance
0.078 nm spatial resolution in STEM is achieved together with high specimen-tilt capability and large solid angle EDX detector(s), all in a single objective lens configuration.
The HF5000 builds on features from Hitachi HD-2700 dedicated STEM including Hitachi's own fully automated aberration corrector, symmetrical dual SDD EDX and Cs-corrected SE imaging. It also incorporates the advanced TEM/STEM technologies developed in the HF series.
Integrating these accumulated technologies into a new 200 kV TEM/STEM platform results in an instrument with an optimum combination of sub-Å imaging and analysis, as well as the flexibility and unique capabilities to address the most advanced studies.
The new high-stability Cold FEG uses a thoroughly redesigned version of Hitachi's long-established cold field-emission electron source technology.
Total system stability has also been optimized in order to achieve sub-Å imaging. The column, power supplies and specimen stage have all been newly designed to offer the very best mechanical and electrical stability. Combining these capabilities with Hitachi's unique fully-automated probe-forming Cs-corrector, just requiring a single click of a mouse, ensures all users can reach the very best performance quickly and easily.
Si(211) single crystal HAADF-STEM image (left), image intensity profile (right lower) and FFT power spectrum (right upper)
High-sensitivity, high-throughput EDX is achieved with symmetrically opposed dual 100 mm2 SDDs.
The symmetrical dual SDD configuration results in an almost constant count rate when tilting. On crystalline samples, EDX acquisition can be performed simply with the zone axis aligned, compared with single detector configuration.
The large solid angle also means that EDX mapping can be achieved even on beam-sensitive and/or low X-ray yield specimens, including atomic column mapping. High pixel resolution EDX with wide field of view is also achievable, providing large high-resolution datasets.
GaAs (110) atomic column EDX elemental mapping
Simultaneous SEM & STEM imaging is offered as standard, with ET-type SE detector.
This enables the correlation of surface and internal information with insights into the 3D structure of the specimen, without the need to perform 3D tomography.
Additionally, the Cs-corrected SEM image offers higher spatial resolution with more faithful surface information
Au/CeO2 catalyst SEM/ADF-/BF-STEM images (upper), and respective high resolution Au particle images (lower).
| Item | Description | |
|---|---|---|
| Electron source | W(310) cold field emission electron source | |
| Accelerating voltage | 200 kV, 60 kV*1 | |
| Imaging resolution | STEM | 0.078 nm(ADF-STEM image) |
| TEM | 0.102 nm(lattice image) | |
| Magnification | STEM | ×20～×8,000,000 |
| TEM | ×100～×1,500,000 | |
| Specimen stage | Specimen stage | Eucentric goniometer 5-axis stage |
| Specimen size | 3 mm Φ | |
| Specimen traverse | X, Y=±1.0 mm, Z=±0.4 mm | |
| Specimen tilt | α=±25°, β=±35°(Hitachi double-tilt specimen holder*1) | |
| Aberration corrector | Hitachi in-house probe-forming spherical aberration corrector (standard equipment) | |
| Image display | Monitor | 27-inch wide LCD panel (for standard monitor and 2nd monitor*1) |
| Camera | Standard retractable camera Screen camera*1 (for viewing fluorescent screen) |
|
| Item | Width×Depth×Height(mm) | Weight(kg) |
|---|---|---|
| Column (incl. electron gun) | 1,060×1,742×2,970 | 1,940 |
| Main unit cover | 1,678×1,970×3,157 | 429 |
| Console unit | 1,400×819×740 | 132 |
| Console extension*1 | 580×819×740 | 53 |
| FE tank | 1,041×840×1,317 | 482 |
| V0 tank | 398×630×1,046 | 164 |
| Control power supply | 1,400×693×816 | 173 |
| Corrector power supply | 606×529×1,096 | 81 |
| Evacuation power supply | 913×663×1,790 | 378 |
| Deflection power supply | 913×663×1,790 | 394 |
| Weight | 280×130×130 | 23 |
| Gatan controller*1*2 | 576×648×1,173 | 150 |
| Cooling water control unit | 470×540×350 | 25 |
| Cooling water recirculator*1*2 | 970×970×1,064 | 95 |
| Dry pump*1 | 252×400×336 | 23 |
| Air compressor*1 | 275×560×576 | 25 |
| Item | Description | |
|---|---|---|
| Room temperature | 15～23℃ (temp. fluctuation : 0.2℃/ h or less) | |
| Humidity | 40～60% RH | |
| Power | Main unit | Single phase AC200～240 V ±10%, 50/60 Hz, 10 kVA Circuit breaker rating 50 A |
| Water recir-culator*1*2 | Three phase AC200 V ±5%, 50/60 Hz, 30 A | |
| Grounding terminal | D-class grounding (ground resistance:100 Ω or less) | |
| Cooling water | Flow rate | 5.1～5.3 L/min 1 system、2.0～2.2 L/min 1 system (pressure 0.25 MPa) |
| Water temperature | 16～18℃ (temp. fluctuation : ±0.1℃ or less) | |
| Gas | SF6 | 99.9% or higher、180 k～200 kPa |
| N2 | 99.99% or higher、0～100 kPa | |
| Air | 600 k～800 kPa | |
Before placing an order, please check floor vibration, acoustic noise and magnetic flux in the installation room. Concerning those allowable spec., please consult with our local representatives.
※A total weight of the above instruments (including maintenance tools) is approximately 5,000 kg.
※Please confirm the floor strength of the room(kg/m2)be 3 times of total weight (kg) / floor area(m2) or more.
Hitachi TEM Application Data
This journal addresses a wide range variety of research papers and useful application data using Hitachi science instruments.
Photo collections of beauty of metals, minerals, organisms etc. reproduced by the electron microscope and finished more beautifully by computer graphic technology.
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