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Science & Medical SystemsHitachi High-Technologies

Ultra-high Resolution Scanning Electron Microscope Regulus Series

As a new brand of FE-SEMs, the Regulus series lineup comprises four models: the Regulus8100, Regulus8220, Regulus8230, and Regulus8240, all of which extend the functions of the SU8200 series with the use of a common platform.

With optimized electron optical systems, the new Regulus series features resolutions down to 0.9 nm in the Regulus8220/8230/8240 models and 1.1 nm in the Regulus8100 model—an improvement of roughly 20% in resolution at 1 kV landing voltage compared with previous models.

The Regulus series employs a novel cold-field-emission (CFE) gun optimized for high-resolution imaging at low accelerating voltages. This CFE gun makes it possible to magnify high-resolution images up to 2 million times,*1 compared with 1 million times in previous models.

User-support functions have also been enhanced so that the advanced performance of the series can be fully leveraged, including functions to assist the operation of the signal detection system for analyzing diverse types of materials, as well as device-maintenance functions.

*1
Only in Regulus8220/8230/8240

    Features

    • Cold field emission (CFE) gun optimized for low-voltage, high-resolution imaging with low aberration
    • Resolution improved by 20% than previous models
      (Regulus8220/8230/8240: 0.9 nm/1 kV; Regulus8100: 1.1 nm/1 kV)
    • Maximum magnification doubled from 1 million times to 2 million times*2
    • User-support functions to ensure high performance

    HR & ULV Imaging

    HR & ULV Imaging
    Specimen: Gold particle on Carbon
    Landing voltage: 10 V

    UHR imaging

    UHR imaging
    Specimen: Catalyst
    Accelerating voltage: 30 kV

    HR & LV EDX analysis

    HR & LV EDX analysis
    Specimen: Tin ball
    Landing voltage: 1.5 kV

     
    *2
    Only in Regulus8220/8230/8240

    Specifications

     Regulus 8100Regulus 8220Regulus 8230Regulus 8240
    Secondary Electron Resolution 0.8 nm (Vacc: 15 kV)
    1.1 nm (Landing voltage: 1 kV)*3
    0.7 nm (Vacc: 15 kV)
    0.9 nm (Landing voltage: 1 kV)*3
    Accelerating voltage 0.5~30 kV 0.5~30 kV
    Landing voltage*3 0.1~2 kV 0.01~20 kV
    Mag. 20~1,000,000 ×*4 20~2,000,000 ×*4
    Specimen stageStage control 3-axis motor drive*5 5-axis motor drive
    Movable rangeX 0~50 mm 0~50 mm 0~110 mm 0~110 mm
    Y 0~50 mm 0~50 mm 0~110 mm 0~80 mm
    R 360°
    T -5~70°
    Z 1.5~30 mm 1.5~40 mm
    Stage repeatability - - - Less than ±0.5 µm
    *3
    Observation in beam deceleration mode
    *4
    Magnification specified based on a display size of 127 mm × 95 mm
    *5
    The 5-axis motor drive is an option for the Regulus8100

    New coherent cold field emission source

    Information on our new cold field emitter technology can be found here.

    Applications

    Hitachi FE-SEM Application Data

    Technical magazine
    "SI NEWS"

    This journal addresses a wide range variety of research papers and useful application data using Hitachi science instruments.

    nanoart

    Photo collections of beauty of metals, minerals, organisms etc. reproduced by the electron microscope and finished more beautifully by computer graphic technology.

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