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As a new brand of FE-SEMs, the Regulus series lineup comprises four models: the Regulus8100, Regulus8220, Regulus8230, and Regulus8240, all of which extend the functions of the SU8200 series with the use of a common platform.
With optimized electron optical systems, the new Regulus series features resolutions down to 0.9 nm in the Regulus8220/8230/8240 models and 1.1 nm in the Regulus8100 model—an improvement of roughly 20% in resolution at 1 kV landing voltage compared with previous models.
The Regulus series employs a novel cold-field-emission (CFE) gun optimized for high-resolution imaging at low accelerating voltages. This CFE gun makes it possible to magnify high-resolution images up to 2 million times,*1 compared with 1 million times in previous models.
User-support functions have also been enhanced so that the advanced performance of the series can be fully leveraged, including functions to assist the operation of the signal detection system for analyzing diverse types of materials, as well as device-maintenance functions.
Specimen: Gold particle on Carbon
Landing voltage: 10 V
Accelerating voltage: 30 kV
Specimen: Tin ball
Landing voltage: 1.5 kV
|Regulus 8100||Regulus 8220||Regulus 8230||Regulus 8240|
|Secondary Electron Resolution||0.8 nm (Vacc: 15 kV)
1.1 nm (Landing voltage: 1 kV)*3
|0.7 nm (Vacc: 15 kV)
0.9 nm (Landing voltage: 1 kV)*3
|Accelerating voltage||0.5~30 kV||0.5~30 kV|
|Landing voltage*3||0.1~2 kV||0.01~20 kV|
|Mag.||20~1,000,000 ×*4||20~2,000,000 ×*4|
|Specimen stage||Stage control||3-axis motor drive*5||5-axis motor drive|
|Movable range||X||0~50 mm||0~50 mm||0~110 mm||0~110 mm|
|Y||0~50 mm||0~50 mm||0~110 mm||0~80 mm|
|Z||1.5~30 mm||1.5~40 mm|
|Stage repeatability||-||-||-||Less than ±0.5 µm|