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Hitachi

Hitachi High-Technologies GLOBAL

The EA6000VX is able to detect contaminants too small to see by the unaided eye. Within a short period of time, areas that contain contaminants are specified, spectra of the contaminants displayed, and a quantitative report produced. With some additional time, a vivid mapping image can be obtained by mapping.

Example of microscopic contaminant detection in a wide area

70 µm iron (Fe) contaminant not visually verifiable was detected by a 3 minute mapping measurement of a 100mm x 100mm measurement area (Figure 2). A detailed mapping image was obtained with a 3 minute measurement of area A in Figure 2 using a micro-sized beam (Figure 3). Detailed mapping clarifies that a contaminant seen as one point by easy mapping is actually two points. Further, detail information about analysis results can be obtained because a spectrum can be displayed for any measurement location (Figure 4).


Figure 1. Sample Image

Measurement Conditions
Voltage: 50kV
Current: 1000µA
Primary filter: OFF
Beam size: 1.2mm (for easy mapping), 0.2mm (for detailed mapping)


Figure 2. Fe Mapping Image
(3 minute easy mapping) Measurement area: 100 x 100mm


Figure 3. Fe Mapping Image
(3 minute detailed mapping) Measurement area: 1 x 1mm


Figure 4. Spectrum of measured location

Example of detecting microscopic sized contaminants

In Figure 2, area B, which is dense with Fe, is mapped for 30 minutes by a microscopic beam, resulting in a detailed mapping image (Figure 5). By specifying the size of a grain of Fe in area C using a high precision optical microscope (Figure 6), we confirmed a size of 50µm. The ability to confirm even smaller mapping images allows detection of contaminants smaller than 50µm.

Figure 5. Fe Mapping Image (30 minute detailed mapping) Measurement area: 10 x 10mm (left)

Figure 6. High resolution microscope image of contaminated area (right)