CD-SEM & Defect Inspection

Used Equipment (Metrology & Inspection)

We sell the used equipment, CD-SEM and others.

Data Station for CD-SEM

The Data Station is a networked central recipe management server.

Terminal PC Software

This software improves the operating efficiency of your CD-SEM.

Wafer Surface Inspection System LS Series

Wafer surface inspection system to detect various types of small defects on non-patterned wafer of next generation device.