Terminal PC Software
This software improves the operating efficiency of your CD-SEM.
The Terminal PC is networked with multiple CD-SEMs which are located within clean rooms in fabrication areas. It allows operator(s) in offices (outside the celan rooms) to download the measurement data. It also allows off-line work such as display/review of measurement data, off-line measurements, check of parameters in recipes for automated measuremens, check and analysis of error generations due to recipes without using nor interrupting CD-SEMs.
Main functions and software modules
The software is available in Full and Lite versions.
|1||Transfer software||Automatic and/or manual transfer of measurement result files and image files from a CD-SEM to the Terminal PC.||✓||✓|
|2||Recipe evaluation software||Displays performance and error information for each recipe in Excel®||✓||N/A|
|3||Recipe viewer software||Displays all recipe information||✓||N/A|
|4||Data processing software||Customerized Excel Macros for evaluation or presentation of data.||✓||✓|
|5||Off-line measurement software||Re-measurement of images on the Terminal PC without interrupting CD-SEMs.||✓||N/A|
|6||Recipe transfer software||Transfers recipes to other equipment||Optional||Optional|
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- S-8000 series (S-8820/8840/8C40)
- S-9200 series (S-9200/9220/9260/9260A)
- S-9300 series (S-9300/9360/9380/9380II)
- CG series (CG4000/4100/4500/5000)