Terminal PC Software
This software improves the operating efficiency of your CD-SEM.
The Terminal PC is networked with multiple CD-SEMs which are located within clean rooms in fabrication areas. It allows operator(s) in offices (outside the celan rooms) to download the measurement data. It also allows off-line work such as display/review of measurement data, off-line measurements, check of parameters in recipes for automated measuremens, check and analysis of error generations due to recipes without using nor interrupting CD-SEMs.
Main functions and software modules
The software is available in Full and Lite versions.
|Automatic and/or manual transfer of measurement result files and image files from a CD-SEM to the Terminal PC.
|Recipe evaluation software
|Displays performance and error information for each recipe in Excel®
|Recipe viewer software
|Displays all recipe information
|Data processing software
|Customerized Excel Macros for evaluation or presentation of data.
|Off-line measurement software
|Re-measurement of images on the Terminal PC without interrupting CD-SEMs.
|Recipe transfer software
|Transfers recipes to other equipment
Excel is a registered trademark of Microsoft Corporation in the United States and other countries.
- S-8000 series (S-8820/8840/8C40)
- S-9200 series (S-9200/9220/9260/9260A)
- S-9300 series (S-9300/9360/9380/9380II)
- CG series (CG4000/4100/4500/5000)