The SU9000 is HITACHI's new premium UHR FE-SEM. It features unique electron optics, with the sample positioned inside a gap of the split objective lens pole piece. This so-called true inlens concept - combined with the next generation of HITACHI's cold field emission technology - guarantees the highest possible system resolution (0.4nm @ 30kV, 1.2nm @ 1kV) and stability.
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