This software improves the operating efficiency of your CD-SEM.
The Terminal PC is networked with multiple CD-SEMs which are located within clean rooms in fabrication areas. It allows operator(s) in offices (outside the celan rooms) to download the measurement data. It also allows off-line work such as display/review of measurement data, off-line measurements, check of parameters in recipes for automated measuremens, check and analysis of error generations due to recipes without using nor interrupting CD-SEMs.
The software is available in Full and Lite versions.
| Module | Function | Full | Lite | |
|---|---|---|---|---|
| 1 | Transfer software | Automatic and/or manual transfer of measurement result files and image files from a CD-SEM to the Terminal PC. | ✓ | ✓ |
| 2 | Recipe evaluation software | Displays performance and error information for each recipe in Excel® | ✓ | N/A |
| 3 | Recipe viewer software | Displays all recipe information | ✓ | N/A |
| 4 | Data processing software | Customerized Excel Macros for evaluation or presentation of data. | ✓ | ✓ |
| 5 | Off-line measurement software | Re-measurement of images on the Terminal PC without interrupting CD-SEMs. | ✓ | N/A |
| 6 | Recipe transfer software | Transfers recipes to other equipment | Optional | Optional |
搜尋
Taiwan