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Hitachi

Analytical Systems, Electron Microscopes & Medical Systems

Scanning Probe Microscopes (SPM/AFM)

  • Scanning Probe Microscopes (SPM/AFM)

  • SIS Mode

  • Physical property evaluation conducted using Environmental Control Unit AFM

  • Physical property evaluation conducted using Environmental Control Unit AFM

Hitachi AFM will prove useful at any stage

Industrial Measurements
(Quality Control)
Semiconductors
Polymers
Materials Science

View by applications

Automation / Ease of use

High accuracy / High resolution

Physical property measurements /
Environmental Controls

Overview of user feedback

The deciding factor for introducing the AFM5300E was the environmental control

Yoshimichi Namai (Lead researcher, Ph.D. (Science) Analysis Unit, Material Properties Research Laboratory Mitsui Chemical Analysis & Consulting Service, Inc.)

The high performance you need to become an expert user.
We love being able to focus on the actual measurements.

Shingo KANEHIRA (Microwave Chemical Co., Ltd. Researcher Ph.D. (Engineering))

Web Seminar

Technology

Overview of applications

“Explanation of principle behind AFM”

History

Product comparison

Product name
Basic functions
Function expandability*
Applicable environments
Fine positioning mechanism for samples
Sample sizes
AFM5500M
Mid-sized Probe Microscope System
AFM, DFM, PM Phase, FFM
SIS topography, SIS material properties, LM-FFM, VE-AFM, Adhesion, Current, Pico-Current, SSRM, PRM, KFM, EFM(AC), EFM(DC), MFM
Atmosphere
Precise motor-driven stage
Observable region: Entire 100 mm (4 inches)
Stroke: Y ± 50 mm, Z ≥21 mm
Minimum Step: XY 2 μm, Z 0.04 μm
Maximum 100 mm diam, thickness 20 mm
AFM5300E
Environmental control unit
AFM, DFM, PM, FFM
SIS, STM, LM-FFM, VE-AFM, Adhesion, Current, SSRM, SNDM, PRM, KFM, EFM, MFM
Ambient, vacuum*, submerged in liquid*, Humidity*
Heating and cooling*
（-120 - 300°C /RT - 800°C)
Manual stage
XY: ±2.5 mm
Maximum 25 mm diam., thickness 10 mm
AFM5100N
Small, general-use unit
Self-detecting
Light Lever: AFM, DFM, PM, FFM
FFM
SIS, STM, LM-FFM, VE-AFM, Adhesion, Current, SSRM, SNDM, PRM, KFM, EFM, MFM
Atmosphere
Manual stage
XY: ±2.5 mm
(Impact stage set *)
Maximum 35 mm diam., thickness 10 mm
Maximum 50 mm corners, thickness 20 mm*

*Optional

Applications

This section introduces applications (actual measurement cases) for scanning probe microscopes

SI NAVI OVERVIEW

Information for product users

This section offers information aimed at customers who use our scanning probe microscopes.

Regarding products no longer in production

Explanation of working principle

For first-time users

Related topics

S.I.navi

“S.I.navi” is Hitachi Membership Site for analytical instruments users.
“S.I.navi” provides helpful information for daily analysis.

Resource

Events

Technology

Actual cases of product adoption

Application Data Sheet

Applications

Explanation of working principle

Automation / Ease of use

High precision / High resolution

Physical property measurements / Environmental Controls