(AFM100):AFM, DFM, PM, FFM, SIS-shapes
(AFM100 Plus):AFM, DFM, PM, FFM, SIS-shapes/properties, Q-value control
SIS-ACCESS, LM-FFM, VE-AFM, Adhesion, MFM, EFM, KFM, PRM, Nano/Pico-Current, SSRM, Pico-STM*(AFM100 Plus only)
Atmosphere, in liquid*, Heated* (*RT - 250°C), heated in liquid (RT -60°C)
Manual stage XY: ±2.5 mm
Impact stage (conductive type)
Maximum 35 mm diam., thickness 10 mm
(max. 50 mm sq., thickness 20 mm)*
AFM, DFM, PM Phase, FFM
SIS topography, SIS material properties, LM-FFM, VE-AFM, Adhesion, Current, Pico-Current, SSRM, PRM, KFM, EFM(AC), EFM(DC), MFM
Atmosphere
Precise motor-driven stage
Observable region: Entire 100 mm (4 inches)
Stroke: Y ± 50 mm, Z ≥21 mm
Minimum Step: XY 2 μm, Z 0.04 μm
Maximum 100 mm diam, thickness 20 mm
AFM, DFM, PM, FFM
SIS, STM, LM-FFM, VE-AFM, Adhesion, Current, SSRM, SNDM, PRM, KFM, EFM, MFM
Ambient, vacuum*, submerged in liquid*, Humidity*
Heating and cooling*
（-120 - 300°C /RT - 800°C)
Manual stage
XY: ±2.5 mm
Maximum 25 mm diam., thickness 10 mm
Self-detecting
Light Lever: AFM, DFM, PM, FFM
FFM
SIS, STM, LM-FFM, VE-AFM, Adhesion, Current, SSRM, SNDM, PRM, KFM, EFM, MFM
Atmosphere
Manual stage
XY: ±2.5 mm
(Impact stage set *)
Maximum 35 mm diam., thickness 10 mm
Maximum 50 mm corners, thickness 20 mm*
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