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Hitachi

Hitachi High Technologies in America

Nippon Signal ECO SCAN optical scanner ESS112

ESS112
ECO SCAN is an electromagnetic drive MEMS optical scanner

Overview

ECO SCAN is an electromagnetic drive MEMS optical scanner. This scanner is configured by aligning permanent magnets around the monocrystal silicon substrate that forms the moving plate (with the mirror and coil on its surface), beams, and supporting section.

Specifications

ESS112-2kHz

One/Two-dimensional type One-dimensional type Resonant frequency 2175Hz±8%
Amplitude(Optical angle) ±20° Driving current(Sine wave) ≦25mAp-p
Resistance 200Ω±25% Weight 8.9g±10%
Mirror size 4x4mm±0.05mm Mirror material Au
Mirror reflectance ≧85%@λ670mm Mirror roughness ≦Ra=10nm
Mirror flatness ≦PV=670nm Impact resistance *1 No breakage with 1000m/s2,Sine half wave pulse :6ms
Vibration resistance *2 No breakage 55 ~ 500Hz,98m/s2 Operating temperature and humidity range +10 ~ 40degrees
20 ~ 80%RH(with no condensation)

Overall dimension drawing (unit:µm)

Characteristics of frequency and amplitude (Sine wave drive)*3

Characteristics of current and amplitude (Sine wave drive)*3

*3:
Reference characteristics
Note:
1.
A powerful magnet is used for the device, Therefore,the user is reminded that a magnetic body near the device may stick fast to the mirror and break it.
2.
Be careful not to break the uncovered mirror with a finger or tweezers.

 

Features

Electromagnetic drive systemElectrostatic drive system 
1.Driving principles
  • Lorentz force
  • Electrostatic force of a counter electrode
2.Merits
  • Low power consumption
  • Low voltage driving
  • Large amplitude
  • Simple control of amplitude
  • High downsizing potential
  • Small mirror part (about 1 mm) that is efficient for small amplitude
3.Demerits
  • Magnets and yokes need to be installed.
  • Small driving power
  • High driving voltage
  • Difficult to control amplitude
4.Actual Results
  • ECO SCAN
  • Accelerometer, gyro sensor, optical communication switches, DMD (Digital Micromirror Device), etc.