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Hitachi

Hitachi High Technologies in America

Nippon Signal ECO SCAN optical scanner ESS115

ESS115
Nippon Signal ECO SCAN optical scanner ESS115

Overview

ECO SCAN is an electromagnetic drive MEMS optical scanner. This scanner is configured by aligning permanent magnets around the monocrystal silicon substrate that forms the moving plate (with the mirror and coil on its surface), beams, and supporting section.

Specifications

ESS115

One/Two-dimensional type One-dimensional type Resonant frequency 565Hz±7%
Amplitude(Optical angle) ±30° Driving current(Sine wave) 33.6mAp-p
Resistance 200Ω±25% Weight 9g±10%
Mirror size 4.5x5.5mm±0.02mm Mirror material Au
Mirror reflectance >85%@λ670nm Mirror flatness ≦PV=1500nm

 

Overall dimension drawing (unit:µm)

Characteristics of frequency and amplitude (Sine wave drive)*3

Characteristics of current and amplitude (Sine wave drive)*3

*3:
Reference characteristics
Note:
1.
A powerful magnet is used for the device, Therefore,the user is reminded that a magnetic body near the device may stick fast to the mirror and break it.
2.
Be careful not to break the uncovered mirror with a finger or tweezers.

 

 

Features

Electromagnetic drive systemElectrostatic drive system 
1.Driving principles
  • Lorentz force
  • Electrostatic force of a counter electrode
2.Merits
  • Low power consumption
  • Low voltage driving
  • Large amplitude
  • Simple control of amplitude
  • High downsizing potential
  • Small mirror part (about 1 mm) that is efficient for small amplitude
3.Demerits
  • Magnets and yokes need to be installed.
  • Small driving power
  • High driving voltage
  • Difficult to control amplitude
4.Actual Results
  • ECO SCAN
  • Accelerometer, gyro sensor, optical communication switches, DMD (Digital Micromirror Device), etc.