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Hitachi

Analytical Systems, Electron Microscopes & Medical Systems

Descriptions

Principle of SPM, AFM

Scanning Probe Microscope (SPM) represents a particular family of advanced microscopy techniques that allow the simultaneous measurements of surface topography as well as a wide variety of material properties at nanometer scale.
The two key members in this family are Scanning Tunneling Microscope (STM) and Atomic Force Microscope (AFM).

Schematic Diagram of SPM
Schematic Diagram of SPM

Schematic of SPM System
Schematic of SPM System

SPM Measurement Mode

Topography

Mechanical Property

Electro Magnetic Property