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  3. Electron Microscopes/Atomic Force Microscopes
  4. Scanning Probe Microscopes/Atomic Force Microscopes (SPM/AFM)
  5. Principle of SPM, AFM
  6. Kelvin probe Force Microscope (KFM)

Kelvin probe Force Microscope (KFM)

Measures the surface potential by the feedback DC voltage by applying AC as well as DC voltages between a conductive cantilever and sample so that the amplitude of the static force component from the AC voltage is zero.

  • CC-KFM (Cyclic contact KFM)
  • NC-KFM (Non-contact KFM
Diagram of electronic energy levels between the probe and metal sample during KFM measurements
Schematic diagram of KFM

DC voltage (VOFF), which is adjusted for the vacuum level (EVAC) to be equal to the probe and sample, becomes equivalent to the contact potential difference (the difference between probe work function ΦP and sample work function Φ S) between the probe and sample.


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