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Science & Medical SystemsHitachi High-Technologies

Electrostatic Force Microscope (EFM)

Applies an AC or DC voltage between a conductive cantilever and sample and creates an image of the electrostatic force components (amplitude component and phase component)by an AC voltage.
・EFM (AC)…AC field response
・EFM (DC)…DC field response
KFM directly detects potential of sample surfaces.
EFM does not directly detect surface potential but has better responsiveness than KFM and is convenient for imaging qualitative electrical properties.


Schematic diagram of EFM(AC)

EFM(AC) measurements before/after AC erase of polarization patterns in ferroelectric thin film