It is well known that orbit width of Sinkansen is managed strictly for safety transportation. This MICRO-RAILROAD is made of the laser interference exposure and the anisotropic etching technology using (110) silicon plate, which realizes high precision that has 0.24 ± 0.001 pitch width. It is expected to use as standard of minute metrology indispensable for the field of advanced technology.
At 51st photo contest hosted by the Japanese Society of Electron Microscopy in 1995.
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*This work was presented at the "photo contest" hosted by the Japanese Society of Microscopy.
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