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© Shunya Watanabe, Mine Nakagawa, Mitsuhiko Yamada (Hitachi Instrument Engineering Co.,Ltd.)

This is a Scanning Electron Microscope image of metal oxide film on silicon substrate. The sparkling objects are made by water vapor emitted from the oxide layer during deoxidation process. The sparkling ranges from 3 to a few ten microns. In the center of the broken layer by water vapor, we can see the silicon substrate intermittently.

At 54th photo contest hosted by the Japanese Society of Electron Microscopy in 1998.


Specimen : RuO2/Si substrate

Instrument : Cold Field Emission Scanning Electron Microscope S-4700

Specimen : Courtesy of Dr. Yuichi Matsui (Central Research Laboratory, Hitachi, Ltd., Japan)

*All information related to these photographers is based on the information when the photo was taken.

*This work was presented at the "photo contest" hosted by the Japanese Society of Microscopy.

*Reproduction or republication without permission prohibited.

*"nanoart" is registered trademark of Hitachi High-Tech Corporation in Japan.

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