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Hitachi High-Tech GLOBAL

February 14, 2011

Hitachi High-Technologies Launches New SU8000 Family of Field Emission Scanning Electron Microscopes

Hitachi High-Technologies Corporation (TOKYO: 8036, Hitachi High-Tech) announces the introduction of the new SU8000 family of Field Emission Scanning Electron Microscopes (FE-SEM) which includes the SU8040 launched on August 1, 2010. The new SU8000 family will be available from February 14, 2011.

Research is being conducted around the world on next-generation technologies that incorporate nanotechnologies in fields such as semiconductors, electronics, functional materials, biotechnology, and pharmaceuticals. The Ultra High Resolution FE-SEM has grown to be an indispensable tool for observing the fine surface structure of materials in a wide range of nanotechnology fields.

In 1992, Hitachi High-Tech launched the S-4500 with a semi-in-lens type objective lens and cold field emission electron source suited to high resolution microscopy that was well received in the market. Later developments included the S-4800 (released in 2002) and SU8000 (released in 2008), both of which are bestselling models, achieving sales figures of more than 1,000 units.

To fulfill tomorrow's market needs, the new Hitachi SU8000 family further extends the exceptional performance developed from these bestselling FE-SEMs. Using a common platform for electron optics across the SU8000 family to achieve ultra high resolution imaging, Hitachi High-Tech utilizes innovative detectors to optimize image performance, including the latest generation of Hitachi's patented super ExB in-lens detection for energy filtering, charge suppression, and contrast control. The user-friendly GUI with a 24.1 inch monitor contributes to comfortable operation.

In addition, the new SU8000 family offers a variety of stages, chambers, and signal detection systems to meet the wide variety of customer-specific needs for ultra high resolution microscopy. Enhanced electron deceleration technology improves resolution at ultra low landing voltages to just 1.3nm at 1.0kV.

The new SU8000 family features the following models:

SU8010 Entry level model with Lower in-chamber/Upper in-lens (Dual) SE detectors.
SU8020 Lower/Upper/Top (Triple) SE detectors to extend the capability to collect
secondary electrons and low energy backscattered electrons This novel, ultrasensitive detection system allows high efficiency, simultaneous multi-signal imaging and energy filtering.
SU8030 Large chamber/large stage model for large or multiple samples.
SU8040 Top-of-the-line model featuring the "Regulus" stage for ultra-smooth and controlled stage operation, and repeatability,even at ultra high magnifications.

The SU8000 family of microscopes has been designed to meet the customer's applications and budgets, fulfilling customer-specific needs for nanotechnology research with flexibility.

Hitachi High-Tech will ship the products starting in April 2011 and expects to achieve sales of 400 units per year in all models total.

SU8040 Field Emission Scanning Electron Microscope


  SU8010 SU8020 SU8030 SU8040
Electron Image
1.0nm(Vacc 15kV、WD=4mm)*1
1.3nm(landing voltage 1kV、WD=1.5mm) *1
Landing voltage 0.1~30kV
Magnification 60x~2,000,000x*2
Specimen Stage Stage control 3-axis motor drive 5-axis motor drive 5-axis motor drive 5-axis motor drive (Regulus Stage*3)
5-axis motor drive (option)
Traverse range X 0~50mm 0~50mm 0~110mm 0~110mm
Y 0~50mm 0~50mm 0~110mm 0~80mm
R 360° 360° 360° 360°
Z 1.5~30mm 1.5~30mm 1.5~40mm 1.5~40mm
T -5~70° -5~70° -5~70° -5~70°
Max. sample size 100mm dia.(Maximum) 100mm dia.(Maximum) 150mm dia.(Maximum) 150mm dia.(Maximum)
150mm dia. (Option) 150mm dia. (Option) 200mm dia.(Option)
Stage repeatability - - - less than ±0.5µm
Secondary Electron Detectors Lower
Top -
  SE/BSE signal mixing function (Upper)
Based on the gap method using Hitachi's standard sample for resolution measurement.
The magnification range 100x2,000,000x2 is based on the image size 345mmx259mm @ 1,280 x 960 pixels
REGULated Ultra Stable Stage (High performance stage from Hitachi High-Tech)

Product Inquiry

Yu Sugimoto, Hiroshi Kato
Marketing Dept., Electron Microscope
Tel: +81-3-3504-7706

Media Inquiries

Aiko Matsumoto
Public & Investor Relations Group,
Secretary's Office
Tel: +81-3-3504-3258

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